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المؤلفون: Masataka Higashiwaki, Hisashi Murakami, Yoshinao Kumagai, Man Hoi Wong, Ken Goto
المصدر: 2020 4th IEEE Electron Devices Technology & Manufacturing Conference (EDTM).
مصطلحات موضوعية: 010302 applied physics, Materials science, Silicon, business.industry, Aperture, Transistor, chemistry.chemical_element, 02 engineering and technology, 021001 nanoscience & nanotechnology, 01 natural sciences, Nitrogen, law.invention, Ion implantation, Gallium oxide, chemistry, law, Electric field, 0103 physical sciences, Optoelectronics, Current (fluid), 0210 nano-technology, business
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::0bd0e5c65e65039ed047620bf9e4f74b
https://doi.org/10.1109/edtm47692.2020.9117894