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المؤلفون: V. Gonda, Cleber Biasotto, Lis K. Nanver, J. van der Cingel, Vladimir Jovanovic
المساهمون: De Lima Monteiro, D., Bonnaud, O., Morimoto, N.
المصدر: ECS Transactions, 23 (1), 2009
مصطلحات موضوعية: Materials science, Dopant, business.industry, Oxide, Recrystallization (metallurgy), Chemical vapor deposition, ultrashallow junctions, excimer laser annealing, amorphous silicon recrystallization, Secondary ion mass spectrometry, chemistry.chemical_compound, Optics, chemistry, Transmission electron microscopy, business, Sheet resistance, Diode
وصف الملف: application/pdf