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المؤلفون: Chun-Ting Lin, Chi Chung Kei, Po Jui Chen, James Su, Chi-Hung Hwang, Bo Heng Liu, Hung Ji Huang, Hai-Pang Chiang, Yuan Fong Chou Chau, Tsung Sheng Kao
المصدر: Journal of Physics D: Applied Physics. 50:375601
مصطلحات موضوعية: Materials science, Acoustics and Ultrasonics, business.industry, chemistry.chemical_element, 02 engineering and technology, 010402 general chemistry, 021001 nanoscience & nanotechnology, Condensed Matter Physics, Electromagnetic heating, 01 natural sciences, 0104 chemical sciences, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, Transformation (function), chemistry, Light energy, Optoelectronics, Nanometre, 0210 nano-technology, Platinum, business, Quantum well
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المؤلفون: Kenji Maeda, Yasushi Sonoda, Masaru Hori, Tiffany Saldana, M Miura, Kazumasa Okuma, Jim Manos, Kenji Ishikawa, Masaru Izawa, Masaru Kurihara, N Yasui, Motohiro Tanaka, Yohei Ishii, Kazunori Shinoda, Hiroyuki Kobayashi, Nobuya Miyoshi, Nobuyuki Negishi
المصدر: Journal of Physics D: Applied Physics. 50:194001
مصطلحات موضوعية: 010302 applied physics, Plasma etching, Acoustics and Ultrasonics, Physics::Instrumentation and Detectors, business.industry, Thermal desorption, Analytical chemistry, 02 engineering and technology, Semiconductor device, 021001 nanoscience & nanotechnology, Condensed Matter Physics, 01 natural sciences, Isotropic etching, Computer Science::Other, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, Etching (microfabrication), 0103 physical sciences, Optoelectronics, Nanometre, Dry etching, 0210 nano-technology, business, Microwave