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المؤلفون: Matthew Werner, Paul R. Chalker, Karl Dawson, J.W. Roberts, Richard J. Potter
المصدر: JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
مصطلحات موضوعية: 010302 applied physics, Materials science, Wide-bandgap semiconductor, chemistry.chemical_element, 02 engineering and technology, Surfaces and Interfaces, Zinc, 021001 nanoscience & nanotechnology, Condensed Matter Physics, 01 natural sciences, Surfaces, Coatings and Films, Atomic layer deposition, chemistry, Low-energy ion scattering, Chemical physics, Sputtering, Ellipsometry, 0103 physical sciences, Deposition (phase transition), Nanometre, 0210 nano-technology
وصف الملف: application/msword
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المؤلفون: Kensaku Kanomata, Masanori Miura, Fumihiko Hirose, Bashir Ahmmad, Ko Kikuchi, Shigeru Kubota
المصدر: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 35:01B121
مصطلحات موضوعية: Argon, chemistry.chemical_element, Nanoparticle, Nanotechnology, 02 engineering and technology, Surfaces and Interfaces, engineering.material, 010402 general chemistry, 021001 nanoscience & nanotechnology, Condensed Matter Physics, 01 natural sciences, 0104 chemical sciences, Surfaces, Coatings and Films, Atomic layer deposition, chemistry, Coating, Chemical engineering, Colloidal gold, engineering, Deposition (phase transition), Nanometre, 0210 nano-technology, Titanium