-
1
المؤلفون: Peter J. DudaIII, Elizabeth Michiko Ashley, Paul F. Nealey
المصدر: Journal of Vacuum Science & Technology B. 39:064005
مصطلحات موضوعية: Nanostructure, Materials science, Silicon, business.industry, Process Chemistry and Technology, Doping, chemistry.chemical_element, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, Nanolithography, Ion implantation, chemistry, Materials Chemistry, Optoelectronics, Nanometre, Dry etching, Electrical and Electronic Engineering, business, Porosity, Instrumentation
-
2
المؤلفون: Christoph Meinecke, Harald Kuhn, Stefan E. Schulz, Thomas Blaudeck, Sascha Hermann, Danny Reuter, Karla Hiller, Mario Baum, Christian Helke
المساهمون: Publica
المصدر: Journal of Vacuum Science & Technology B
مصطلحات موضوعية: Bridging (networking), Materials science, business.industry, Process Chemistry and Technology, Interface (computing), Nanotechnology, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, Nanolithography, Quantum dot, Nano, Materials Chemistry, Microelectronics, System integration, Electrical and Electronic Engineering, business, Instrumentation, Nanoscopic scale
-
3
المؤلفون: Sihan Chen, William P. King
المصدر: Journal of Vacuum Science & Technology B. 39:032601
مصطلحات موضوعية: chemistry.chemical_classification, Nanostructure, Materials science, Capillary action, Process Chemistry and Technology, Polymer, Capillary number, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, Nanolithography, chemistry, Ribbon, Materials Chemistry, Radius of gyration, Deposition (phase transition), Electrical and Electronic Engineering, Composite material, Instrumentation
-
4
المؤلفون: Ao Guo, Y. Carol Shieh, Rong Wang, Ralu Divan
المصدر: Journal of Vacuum Science & Technology B. 39:012801
مصطلحات موضوعية: Nanostructure, Materials science, Silicon, viruses, Process Chemistry and Technology, chemistry.chemical_element, Nanotechnology, Adhesion, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, Nanolithography, chemistry, Materials Chemistry, Wafer, Wetting, Electrical and Electronic Engineering, Reactive-ion etching, Contact area, Instrumentation
-
5
المؤلفون: Pavel Podesva, Imrich Gablech, Jan Pekárek, Huanan Li, Vojtěch Svatoš, Levent Yobas, Sheng Ni, Pavel Neužil, Hanliang Zhu, Xiaocheng Liu, Haoqing Zhang, Jianguo Feng
المصدر: Journal of Vacuum Science & Technology B. 38:063002
مصطلحات موضوعية: Computer science, Microfluidics, 02 engineering and technology, Integrated circuit, 01 natural sciences, Soft lithography, law.invention, Software, law, 0103 physical sciences, Hardware_INTEGRATEDCIRCUITS, Materials Chemistry, Electrical and Electronic Engineering, Instrumentation, Microscale chemistry, 010302 applied physics, business.industry, Process Chemistry and Technology, 021001 nanoscience & nanotechnology, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, Nanolithography, 0210 nano-technology, Engineering design process, business, Computer hardware, Microfabrication
-
6
المؤلفون: Ran Zhang, Jinkui Chu, Chuanlong Guan, Yuanyi Fan, Ze Liu
المصدر: Journal of Vacuum Science & Technology B. 38:032603
مصطلحات موضوعية: Fabrication, Nanostructure, Materials science, Process Chemistry and Technology, Replica, Nanotechnology, Finite element method, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, Nanoimprint lithography, law.invention, Nanolithography, law, Materials Chemistry, Electrical and Electronic Engineering, Instrumentation
-
7
المؤلفون: Grant van Riessen, Alaleh Aminzadeh, Hemayet Uddin, Dan Smith, Manjith Bose, Andrew G. Peele
المصدر: Journal of Vacuum Science & Technology B. 37:061608
مصطلحات موضوعية: 010302 applied physics, Materials science, business.industry, Process Chemistry and Technology, Extreme ultraviolet lithography, 02 engineering and technology, 021001 nanoscience & nanotechnology, 01 natural sciences, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, Nanolithography, Resist, Etching (microfabrication), Extreme ultraviolet, 0103 physical sciences, Materials Chemistry, Optoelectronics, Electrical and Electronic Engineering, Reactive-ion etching, 0210 nano-technology, business, Instrumentation, Electron-beam lithography, Thermal scanning probe lithography
-
8
المؤلفون: James H. G. Owen, John N. Randall, Joseph Lake, Ehud Fuchs
المصدر: Journal of Vacuum Science & Technology B. 37:061605
مصطلحات موضوعية: 010302 applied physics, Physics, Condensed matter physics, Process Chemistry and Technology, 02 engineering and technology, Electron, 021001 nanoscience & nanotechnology, 01 natural sciences, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, law.invention, Atomic layer deposition, Nanolithography, Resist, law, 0103 physical sciences, Nano, Materials Chemistry, Electrical and Electronic Engineering, Scanning tunneling microscope, 0210 nano-technology, Instrumentation, Lithography, Electron-beam lithography
-
9
المؤلفون: Vineeth Sasidharan, Shrawan Singhal, S. R. J. Brueck, Sidlgata V. Sreenivasan, Ruichao Zhu, Alexander Neumann, Juan J. Faria-Briceno
المصدر: Journal of Vacuum Science & Technology B. 37:052904
مصطلحات موضوعية: Materials science, Fabrication, 02 engineering and technology, 01 natural sciences, Soft lithography, Roll-to-roll processing, law.invention, Optics, Nanomanufacturing, law, 0103 physical sciences, Materials Chemistry, Electrical and Electronic Engineering, Instrumentation, 010302 applied physics, business.industry, Process Chemistry and Technology, Metamaterial, Polarizer, 021001 nanoscience & nanotechnology, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, Metrology, Nanolithography, 0210 nano-technology, business
-
10
المؤلفون: Mathias Holz, Roland Fussl, Ahmad Ahmad, Ivo W. Rangelow, J. Radojewski, G. Jóźwiak, Tzvetan Ivanov, Teodor Gotszalk, Eberhard Manske, Thomas Fröhlich
المصدر: Journal of Vacuum Science & Technology B. 37:030803
مصطلحات موضوعية: 010302 applied physics, Materials science, Process Chemistry and Technology, Nanotechnology, 02 engineering and technology, 021001 nanoscience & nanotechnology, 01 natural sciences, Piezoresistive effect, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, Metrology, Scanning probe microscopy, Beyond CMOS, Nanolithography, CMOS, Nanoelectronics, 0103 physical sciences, Materials Chemistry, Electrical and Electronic Engineering, 0210 nano-technology, Instrumentation, Lithography