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المؤلفون: Minjun Yan, K.R.V. Subramanian, Ilesanmi Adesida, Sookyung Choi
المصدر: Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 26:2306-2310
مصطلحات موضوعية: chemistry.chemical_classification, Materials science, Resolution (electron density), Analytical chemistry, Isopropyl alcohol, Polymer, Condensed Matter Physics, Dot pitch, Methyl isobutyl ketone, chemistry.chemical_compound, Laser linewidth, chemistry, Resist, Polymer chemistry, Cathode ray, Electrical and Electronic Engineering
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المؤلفون: Weilun Chao, Peter Fischer, Ji-Hoon Kim, Senajith Rekawa, Erik H. Anderson
المصدر: Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 27:2606
مصطلحات موضوعية: Fabrication, Materials science, business.industry, Gold plating, Resolution (electron density), Zone plate, Condensed Matter Physics, Soft lithography, law.invention, chemistry.chemical_compound, Optics, Resist, chemistry, law, Multiple patterning, Electrical and Electronic Engineering, business, Hydrogen silsesquioxane
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المؤلفون: Mark P. Stoykovich, Franco Cerrina, Ivan Junarsa, Paul F. Nealey, Yuansheng Ma, Harun H. Solak
المصدر: Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 23:138
مصطلحات موضوعية: Materials science, business.industry, Extreme ultraviolet lithography, Resolution (electron density), General Engineering, Photoresist, chemistry.chemical_compound, Nanolithography, Optics, chemistry, Resist, Extreme ultraviolet, Optoelectronics, business, Hydrogen silsesquioxane, Lithography
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::ca4d3f5110d1f6383b8e5eb5e1776b94
https://doi.org/10.1116/1.1849213 -
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المؤلفون: Evelyn L. Hu, William J. Mitchell
المصدر: Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 20:596
مصطلحات موضوعية: Reflection high-energy electron diffraction, Materials science, business.industry, Scanning electron microscope, Resolution (electron density), General Engineering, equipment and supplies, Condensed Matter::Materials Science, chemistry.chemical_compound, Optics, Semiconductor, chemistry, Resist, Electron beam-induced deposition, Titanium isopropoxide, business, Image resolution
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::cd28db175c1113b9078c0b1d11d595ea
https://doi.org/10.1116/1.1458954 -
5
المصدر: Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 18:3419
مصطلحات موضوعية: Yield (engineering), Materials science, business.industry, Bilayer, Resolution (electron density), General Engineering, Electron, chemistry.chemical_compound, Optics, chemistry, Resist, Optoelectronics, business, Hydrogen silsesquioxane, Nanoscopic scale, Electron-beam lithography
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::558f6bbeb8cfb0285c2b1120f33ab5d1
https://doi.org/10.1116/1.1319682 -
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المؤلفون: Koichi Sudoh, Masahide Gotoh, Hiroshi Iwasaki
المصدر: Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 18:2165
مصطلحات موضوعية: Materials science, Silicon, Resolution (electron density), General Engineering, Analytical chemistry, Oxide, chemistry.chemical_element, Surface finish, law.invention, Field electron emission, chemistry.chemical_compound, chemistry, law, Etching, Cathode ray, Scanning tunneling microscope
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::0a329044a9d37d8d8770e7925cbc9c7b
https://doi.org/10.1116/1.1303856 -
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المؤلفون: Chunli Bai, Junwei Li, Chen Wang, Jing Tang
المصدر: Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 18:1858
مصطلحات موضوعية: stomatognathic diseases, chemistry.chemical_compound, Chemistry, Resolution (electron density), Condensation, General Engineering, Analytical chemistry, Molecule, Nanometre, Mica, Porosity, Layer (electronics), Silane
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::408b31a9f77702678909ce258dbd1490
https://doi.org/10.1116/1.1305270 -
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المؤلفون: P. Hallett, John Trinick, L. Tskhovrebova, G. Offer, Mervyn J Miles
المصدر: Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 14:1444
مصطلحات موضوعية: Aqueous solution, Materials science, biology, Resolution (electron density), General Engineering, Analytical chemistry, macromolecular substances, Propanol, chemistry.chemical_compound, chemistry, Myosin, biology.protein, Biophysics, Molecule, Titin, Mica, Image resolution
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::6041799ca3b097aa16a582a9fd7ce4f1
https://doi.org/10.1116/1.589116 -
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المؤلفون: David K. Ferry, M. Khoury
المصدر: Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 14:75
مصطلحات موضوعية: Beam diameter, Materials science, Proximity effect (electron beam lithography), Resolution (electron density), General Engineering, Analytical chemistry, Poly(methyl methacrylate), chemistry.chemical_compound, chemistry, Resist, visual_art, visual_art.visual_art_medium, Methyl methacrylate, Image resolution, Lithography
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::d9e71a9f2bc0e01913271e052f59e327
https://doi.org/10.1116/1.588437 -
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المؤلفون: Paul K. Hansma, Guo‐Fan Hong, Xiaowei Yao, Helen G. Hansma, Min-Qian Li
المصدر: Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 12:1465
مصطلحات موضوعية: Materials science, biology, DNA polymerase, Atomic force microscopy, Resolution (electron density), technology, industry, and agriculture, General Engineering, Molecular biology, chemistry.chemical_compound, Plasmid, chemistry, Plasmid dna, biology.protein, Biophysics, Sample preparation, DNA polymerase I, DNA
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::e97ce942144fbb749898d920e58663d7
https://doi.org/10.1116/1.587317