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1
المؤلفون: Xiangdong Ye, Hongzhong Liu, Bingheng Lu, Yucheng Ding, Hansong Li
المصدر: Microelectronic Engineering. 86:310-313
مصطلحات موضوعية: chemistry.chemical_classification, Materials science, Compression molding, Polymer, Molding (process), Condensed Matter Physics, medicine.disease_cause, Atomic and Molecular Physics, and Optics, Lower temperature, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, Nanolithography, chemistry, Mold, Hardening (metallurgy), medicine, Electrical and Electronic Engineering, Composite material, Curing (chemistry)
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2
المؤلفون: Hansong Li, Yucheng Ding, Bingheng Lu, Yiping Tang, Hongzhong Liu
المصدر: Microelectronic Engineering. 83:485-491
مصطلحات موضوعية: Pressing, Materials science, business.industry, Photoresist, Condensed Matter Physics, Atomic and Molecular Physics, and Optics, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, law.invention, Optics, Resist, law, X-ray lithography, Electrical and Electronic Engineering, Photolithography, Composite material, Thin film, business, Lithography, Electron-beam lithography