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المؤلفون: Mutumi Tuda, Kenji Shintani, Junji Tanimura
المصدر: Plasma Sources Science and Technology. 12:S72-S79
مصطلحات موضوعية: Chemistry, business.industry, technology, industry, and agriculture, Plasma, Condensed Matter Physics, Laser linewidth, Optics, X-ray photoelectron spectroscopy, Transmission electron microscopy, Etching (microfabrication), Optoelectronics, Nanometre, Wafer, business, Deposition (law)