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المؤلفون: Dehui Zhang, Zhe Liu, Huabin Sun, Minmin Zhou, Xinran Wang, Tianhong Chen, Zhaohui Zhong, Yi Shi, Che-Hong Liu, Dakuan Zhang
المصدر: APL Materials, Vol 9, Iss 3, Pp 031104-031104-5 (2021)
مصطلحات موضوعية: Fabrication, Materials science, lcsh:Biotechnology, Gate dielectric, 02 engineering and technology, Dielectric, Photoresist, 01 natural sciences, law.invention, law, lcsh:TP248.13-248.65, 0103 physical sciences, General Materials Science, Planar process, 010302 applied physics, chemistry.chemical_classification, business.industry, Graphene, General Engineering, Polymer, 021001 nanoscience & nanotechnology, lcsh:QC1-999, chemistry, Optoelectronics, Nanometre, 0210 nano-technology, business, lcsh:Physics
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::158484b59de1a24bd6142942399a3497
https://doaj.org/article/9253fb1ccab146c1af8cb16f7f5fca87