-
1
المصدر: Journal of Vacuum Science & Technology B. 38:053201
مصطلحات موضوعية: Materials science, chemistry.chemical_element, 02 engineering and technology, 01 natural sciences, Sputtering, 0103 physical sciences, Materials Chemistry, Process control, Wafer, Electrical and Electronic Engineering, Boron, Instrumentation, 010302 applied physics, business.industry, Process Chemistry and Technology, 021001 nanoscience & nanotechnology, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, Secondary ion mass spectrometry, chemistry, Impact energy, Optoelectronics, Nanometre, 0210 nano-technology, business, Data reduction