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المؤلفون: Sean J. O’Shea, Michel Bosman, K. Shubhakar, Miyuki Kouda, Kuniyuki Kakushima, Kin Leong Pey, Hiroshi Iwai, Sunil Singh Kushvaha
المساهمون: School of Electrical and Electronic Engineering
المصدر: Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena. 32:03D125
مصطلحات موضوعية: Permittivity, Materials science, business.industry, Process Chemistry and Technology, Analytical chemistry, Dielectric, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, Amorphous solid, Scanning probe microscopy, CMOS, Transmission electron microscopy, Engineering::Electrical and electronic engineering [DRNTU], Materials Chemistry, Optoelectronics, Grain boundary, Electrical and Electronic Engineering, business, Instrumentation, Nanoscopic scale
وصف الملف: application/pdf