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المصدر: IEEE Sensors Journal. 19:3276-3281
مصطلحات موضوعية: Materials science, Silicon, business.industry, 010401 analytical chemistry, chemistry.chemical_element, Electrolyte, Substrate (electronics), Porous silicon, 01 natural sciences, 0104 chemical sciences, Electropolishing, Membrane, chemistry, Etching (microfabrication), Optoelectronics, Wafer, Electrical and Electronic Engineering, business, Instrumentation