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المؤلفون: Kyriakos Komvopoulos, Shengxi Wang
مصطلحات موضوعية: Technology, Materials science, Silicon, Annealing (metallurgy), Stress analysis, chemistry.chemical_element, 02 engineering and technology, Molecular dynamics, 01 natural sciences, Stress relief, Film structure, Ultrathin film, Engineering, Atomic hybridization, 0103 physical sciences, Materials Chemistry, Applied Physics, 010302 applied physics, Metals and Alloys, Amorphous carbon, Surfaces and Interfaces, 021001 nanoscience & nanotechnology, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, chemistry, Chemical physics, Physical Sciences, Nanometre, 0210 nano-technology, Internal stress
وصف الملف: application/pdf
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::14d4a2f944e6b06d0a66ef0c71598cc7
https://escholarship.org/uc/item/5xq14378 -
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المؤلفون: V. I. Luchin, N. N. Salashchenko, S. Yu. Zuev, Nikolay I. Chkhalo, N. N. Tsybin, A. Ya. Lopatin, Sergey Kuzin
المصدر: Thin Solid Films. 653:359-364
مصطلحات موضوعية: Materials science, Metals and Alloys, Molybdenum disilicide, chemistry.chemical_element, 02 engineering and technology, Surfaces and Interfaces, Nitride, 021001 nanoscience & nanotechnology, 01 natural sciences, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, 010309 optics, Wavelength, chemistry.chemical_compound, chemistry, Aluminium, 0103 physical sciences, Monolayer, Ultimate tensile strength, Materials Chemistry, Nanometre, Thin film, Composite material, 0210 nano-technology
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المؤلفون: Jianwei Han, Xuehua Zhao, Jun Li, Biao Chen, Limin Wang, Jinge Lv, Jie Xu, He Yulong, Xiaomin Wang
المصدر: Thin Solid Films. 727:138671
مصطلحات موضوعية: 010302 applied physics, Microvia, Materials science, Metals and Alloys, chemistry.chemical_element, 02 engineering and technology, Surfaces and Interfaces, 021001 nanoscience & nanotechnology, Electrochemistry, 01 natural sciences, Copper, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, Secondary ion mass spectrometry, chemistry.chemical_compound, Leveler, chemistry, Chemical engineering, 0103 physical sciences, Materials Chemistry, Copper plating, Nanometre, 0210 nano-technology, Naphthalene
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المؤلفون: Tomohiro Morita, Mitsunori Yada, Toshio Torikai, Takanori Watari, Shintaro Imamura, Yuko Inoue
المصدر: Thin Solid Films. 628:184-189
مصطلحات موضوعية: Nanocomposite, Materials science, Ion exchange, Inorganic chemistry, Metals and Alloys, chemistry.chemical_element, 02 engineering and technology, Surfaces and Interfaces, Crystal structure, 010402 general chemistry, 021001 nanoscience & nanotechnology, Phosphate, 01 natural sciences, Silver nanoparticle, 0104 chemical sciences, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, chemistry.chemical_compound, chemistry, Chemical engineering, Materials Chemistry, Nanometre, Thin film, 0210 nano-technology, Titanium
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المؤلفون: Shubra Singh, Kapil Gupta, Werner Paulus, M. S. Ramachandra Rao, Monica Ceretti
المصدر: physica status solidi (a). 210:1771-1777
مصطلحات موضوعية: Diffraction, chemistry.chemical_element, 02 engineering and technology, engineering.material, 010402 general chemistry, 01 natural sciences, Oxygen, Materials Chemistry, Brownmillerite, Electrical and Electronic Engineering, Scaling, Range (particle radiation), Chemistry, Surfaces and Interfaces, 021001 nanoscience & nanotechnology, Condensed Matter Physics, Grain size, 0104 chemical sciences, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, Crystallography, Chemical physics, Transmission electron microscopy, engineering, Nanometre, 0210 nano-technology
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المساهمون: Semi-conducteurs à large bande interdite (SC2G), Institut Néel (NEEL), Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP )-Centre National de la Recherche Scientifique (CNRS)-Université Joseph Fourier - Grenoble 1 (UJF)-Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP )-Centre National de la Recherche Scientifique (CNRS)-Université Joseph Fourier - Grenoble 1 (UJF), Groupe d'Etude de la Matière Condensée (GEMAC), Université de Versailles Saint-Quentin-en-Yvelines (UVSQ)-Centre National de la Recherche Scientifique (CNRS), National Institute for Materials Science (NIMS), Japan Society for the Promotion of Science, Japan (No. 23360143).
المصدر: Thin Solid Films
Thin Solid Films, Elsevier, 2014, 557, pp.222-226. ⟨10.1016/j.tsf.2013.10.076⟩مصطلحات موضوعية: Materials science, Ion beam, Resolution (mass spectrometry), Analytical chemistry, chemistry.chemical_element, 02 engineering and technology, engineering.material, 01 natural sciences, 0103 physical sciences, Materials Chemistry, Boron, 010302 applied physics, Delta-doping, Layer by layer, Doping, Metals and Alloys, Diamond, Surfaces and Interfaces, 021001 nanoscience & nanotechnology, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, [SPI.TRON]Engineering Sciences [physics]/Electronics, Secondary ion mass spectrometry, chemistry, engineering, [PHYS.COND.CM-MS]Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci], Nanometre, 0210 nano-technology, SIMS, Depth resolution function
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المؤلفون: Marianne Coig, Matthew Charles, Christophe Licitra, Aurélien Lardeau-Falcy, Frédéric Mazen, Joël Eymery, Yannick Baines
المصدر: physica status solidi (a). 214:1600487
مصطلحات موضوعية: Diffraction, Photoluminescence, Materials science, Silicon, Annealing (metallurgy), chemistry.chemical_element, Nanotechnology, 02 engineering and technology, Surfaces and Interfaces, 021001 nanoscience & nanotechnology, Condensed Matter Physics, 01 natural sciences, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, Cracking, Ion implantation, chemistry, 0103 physical sciences, Materials Chemistry, Nanometre, Electrical and Electronic Engineering, Composite material, 010306 general physics, 0210 nano-technology
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المؤلفون: P. Holliger, Jean-Michel André, Franck Delmotte, Arnaud Jérôme, Françoise Bridou, H. Maury, Philippe Jonnard, Marc Roulliay, Julien Gautier, Marie-Françoise Ravet
المساهمون: Laboratoire de Chimie Physique - Matière et Rayonnement (LCPMR), Université Pierre et Marie Curie - Paris 6 (UPMC)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS), Laboratoire Charles Fabry de l'Institut d'Optique / Scop, Laboratoire Charles Fabry de l'Institut d'Optique (LCFIO), Université Paris-Sud - Paris 11 (UP11)-Institut d'Optique Graduate School (IOGS)-Centre National de la Recherche Scientifique (CNRS)-Université Paris-Sud - Paris 11 (UP11)-Institut d'Optique Graduate School (IOGS)-Centre National de la Recherche Scientifique (CNRS), Commissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information (CEA-LETI), Direction de Recherche Technologique (CEA) (DRT (CEA)), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA), Laboratoire de Chimie Physique - Matière et Rayonnement ( LCPMR ), Université Pierre et Marie Curie - Paris 6 ( UPMC ) -Centre National de la Recherche Scientifique ( CNRS ), Laboratoire Charles Fabry de l'Institut d'Optique ( LCFIO ), Université Paris-Sud - Paris 11 ( UP11 ) -Institut d'Optique Graduate School ( IOGS ) -Centre National de la Recherche Scientifique ( CNRS ) -Université Paris-Sud - Paris 11 ( UP11 ) -Institut d'Optique Graduate School ( IOGS ) -Centre National de la Recherche Scientifique ( CNRS ), Laboratoire d'Electronique et des Technologies de l'Information ( CEA-LETI ), Université Grenoble Alpes [Saint Martin d'Hères]-Commissariat à l'énergie atomique et aux énergies alternatives ( CEA ), Centre National de la Recherche Scientifique (CNRS)-Institut d'Optique Graduate School (IOGS)-Université Paris-Sud - Paris 11 (UP11)-Centre National de la Recherche Scientifique (CNRS)-Institut d'Optique Graduate School (IOGS)-Université Paris-Sud - Paris 11 (UP11)
المصدر: Thin Solid Films
Thin Solid Films, 2006, 514 (1-2), pp.278-286
Thin Solid Films, Elsevier, 2006, 514 (1-2), pp.278-286
HALمصطلحات موضوعية: 010302 applied physics, [PHYS.PHYS.PHYS-OPTICS]Physics [physics]/Physics [physics]/Optics [physics.optics], [ PHYS.PHYS.PHYS-OPTICS ] Physics [physics]/Physics [physics]/Optics [physics.optics], Silicon, Metals and Alloys, Analytical chemistry, chemistry.chemical_element, 02 engineering and technology, Surfaces and Interfaces, Sputter deposition, 021001 nanoscience & nanotechnology, 01 natural sciences, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, Secondary ion mass spectrometry, X-ray reflectivity, chemistry.chemical_compound, chemistry, 0103 physical sciences, Silicide, Cavity magnetron, Materials Chemistry, Nanometre, Thin film, 0210 nano-technology
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المؤلفون: C. Le Paven-Thivet, C. Legrand-Buscema, L. Maillé, C. Sant, Pierre Garnier
المساهمون: Laboratoire des Composites Thermostructuraux (LCTS), Centre National de la Recherche Scientifique (CNRS)-Snecma-SAFRAN group-Université de Bordeaux (UB)-Institut de Chimie du CNRS (INC)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA), Université d'Evry Val d'Essonne, Institut d'Électronique et des Technologies du numéRique (IETR), Université de Nantes (UN)-Université de Rennes 1 (UR1), Université de Rennes (UNIV-RENNES)-Université de Rennes (UNIV-RENNES)-Institut National des Sciences Appliquées - Rennes (INSA Rennes), Institut National des Sciences Appliquées (INSA)-Université de Rennes (UNIV-RENNES)-Institut National des Sciences Appliquées (INSA)-CentraleSupélec-Centre National de la Recherche Scientifique (CNRS), Université de Bordeaux (UB)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Institut de Chimie du CNRS (INC)-Snecma-SAFRAN group-Centre National de la Recherche Scientifique (CNRS), Université d'Évry-Val-d'Essonne (UEVE), Université de Nantes (UN)-Université de Rennes (UR)-Institut National des Sciences Appliquées - Rennes (INSA Rennes), Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-CentraleSupélec-Centre National de la Recherche Scientifique (CNRS), Nantes Université (NU)-Université de Rennes 1 (UR1)
المصدر: Thin Solid Films
Thin Solid Films, Elsevier, 2003, 428 (1-2), pp.237-241. ⟨10.1016/S0040-6090(02)01277-4⟩
Thin Solid Films, 2003, 428 (1-2), pp.237-241. ⟨10.1016/S0040-6090(02)01277-4⟩مصطلحات موضوعية: Materials science, Nanostructure, X-Ray diffraction _____________________________________________________________________________, Analytical chemistry, Mineralogy, chemistry.chemical_element, 02 engineering and technology, Tungsten, 01 natural sciences, Phase (matter), 0103 physical sciences, Materials Chemistry, [CHIM]Chemical Sciences, Lamellar structure, Thin film, Power density, 010302 applied physics, W 3 O structure, Metals and Alloys, Surfaces and Interfaces, [CHIM.MATE]Chemical Sciences/Material chemistry, 021001 nanoscience & nanotechnology, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, Atomic Force Microscopy, chemistry, RF-sputtering, 13. Climate action, X-ray crystallography, Nanometre, tungsten thin films, W structure, 0210 nano-technology
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