المؤلفون: Satoshi Nagai, Arata Kaneko, Tatsuki Sugihara

المصدر: Precision Engineering. 74:205-208

مصطلحات موضوعية: Fabrication, Materials science, Resist, business.industry, Monte Carlo method, Nano, General Engineering, Optoelectronics, business, Electron-beam lithography, Groove (music), Line (formation), Voltage

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::7d981c6793fddb71cac66c14505e666f
https://doi.org/10.1016/j.precisioneng.2021.11.014

المؤلفون: Sergey N. Koreshev, Sergei O. Starovoitov, Denis S. Smorodinov

المصدر: Naučno-tehničeskij Vestnik Informacionnyh Tehnologij, Mehaniki i Optiki, Vol 21, Iss 3, Pp 352-360 (2021)

مصطلحات موضوعية: Materials science, business.industry, display of the hologram structure on solid media, electron-beam lithography, permissible errors of pixel positioning, Mechanical Engineering, QC350-467, QA75.5-76.95, Optics. Light, quality of the reconstructed image, image thresholding, Atomic and Molecular Physics, and Optics, Computer Science Applications, Electronic, Optical and Magnetic Materials, law.invention, Optics, law, Electronic computers. Computer science, computer-generated holograms, Photolithography, photolithography, business, Electron-beam lithography, Information Systems

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::91c852e3c6d8eb0efba180d094b7bf62
https://doi.org/10.17586/2226-1494-2021-21-3-352-360

المؤلفون: Onur Erdem, Sina Foroutan-Barenji, Hilmi Volkan Demir, Farzan Shabani, Yemliha Altintas, Muhammad Hamza Humayun, Negar Gheshlaghi

المساهمون: School of Electrical and Electronic Engineering, School of Physical and Mathematical Sciences, Bilkent Universit, Turkey, LUMINOUS! Centre of Excellence for Semiconductor Lighting & Displays, Centre for Optical Fibre Technology, The Photonics Institute, Gheshlaghi, Negar, Foroutan-Barenji, Sina, Erdem, Onur, Altintas, Yemliha, Shabani, Farzan, Humayun, Muhammad Hamza, Demir, Hilmi Volkan, AGÜ, Mühendislik Fakültesi, Malzeme Bilimi ve Nanoteknoloji Mühendisliği Bölümü

المصدر: Nano Letters

مصطلحات موضوعية: Materials science, Optical nanocircuit, FOS: Physical sciences, Physics::Optics, Nanoparticle, Bioengineering, Applied Physics (physics.app-ph), Semiconductor Nanocrystals, Grating, law.invention, Colloidal quantum wells, Resonator, Physics [Science], law, General Materials Science, Quantum well, business.industry, Mechanical Engineering, Physics - Applied Physics, General Chemistry, Condensed Matter Physics, Laser, Nanocrystal, Direct Nanopatterning, Electrical and electronic engineering [Engineering], Electron beam lithography, Microlaser, Optoelectronics, UV-induced ligand exchange, business, Lasing threshold, Electron-beam lithography

وصف الملف: application/pdf

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::bf7de3e981036164c18c2cbe86180460
https://doi.org/10.1021/acs.nanolett.1c00464

المؤلفون: Eberhard Manske, Jaqueline Stauffenberg, Bernd Hähnlein, Kashyap Udas, Heiko O. Jacobs, Jörg Pezoldt, Sergey P. Lebedev, Alexander A. Lebedev, Sobin Mathew

المصدر: Materials Today: Proceedings. 53:289-292

مصطلحات موضوعية: Length scale, Materials science, business.industry, Graphene, Surface finish, Grating, law.invention, Semiconductor, law, Optoelectronics, business, Nanoscopic scale, Critical dimension, Electron-beam lithography

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::c001e3742596b3a33a7683c21d068b06
https://doi.org/10.1016/j.matpr.2021.06.427

المؤلفون: Yi-Feng Ye, Yue-Yang Jia, Bin Xia, Lin-Sheng Wu, Zong-Rui Xu, Jun-Fa Mao

المصدر: IEEE Transactions on Microwave Theory and Techniques. 70:24-34

مصطلحات موضوعية: Radiation, Materials science, business.industry, Programmable metallization cell, Condensed Matter Physics, RF switch, Optoelectronics, Equivalent circuit, Insertion loss, Electrical and Electronic Engineering, business, Phase shift module, Electron-beam lithography, Voltage, Electronic circuit

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::2ae80b033b56f95119cb23a7bc60e67a
https://doi.org/10.1109/tmtt.2021.3124242

المؤلفون: Yang Mingchao, Xiaolong Zhao, Yahui Cai, Liangliang Zhang, Shuwen Guo, Xianghe Fu, Yongning He, Guo Xiaochuan

المصدر: IEEE Transactions on Electron Devices. 68:6208-6215

مصطلحات موضوعية: Materials science, business.industry, Photodetector, Biasing, medicine.disease_cause, Electronic, Optical and Magnetic Materials, Light intensity, Responsivity, Etching (microfabrication), medicine, Optoelectronics, Electrical and Electronic Engineering, Inductively coupled plasma, business, Ultraviolet, Electron-beam lithography

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::3f44189ff4d6badc1e49257185efd160
https://doi.org/10.1109/ted.2021.3117193

المؤلفون: Dengkui Wang, Chuang Qiao, Dan Fang, Jilong Tang, Baoshun Zhang, Xuan Fang, Zhipeng Wei

المصدر: Integrated Ferroelectrics. 219:260-267

مصطلحات موضوعية: Materials science, business.industry, Astrophysics::Instrumentation and Methods for Astrophysics, Physics::Optics, Bragg's law, Grating, Condensed Matter::Mesoscopic Systems and Quantum Hall Effect, Condensed Matter Physics, Laser, Distributed Bragg reflector, Electronic, Optical and Magnetic Materials, law.invention, Semiconductor laser theory, Condensed Matter::Materials Science, Semiconductor, Control and Systems Engineering, law, Fiber laser, Materials Chemistry, Ceramics and Composites, Optoelectronics, Physics::Atomic Physics, Electrical and Electronic Engineering, business, Electron-beam lithography

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::ceb29dd5ad0c44998f2d0778e1470c5a
https://doi.org/10.1080/10584587.2021.1911373

المؤلفون: Michael Menard, Devika Padmakumar Nair

المصدر: IEEE Photonics Journal. 13:1-7

مصطلحات موضوعية: Materials science, Multi-mode optical fiber, Silicon, business.industry, chemistry.chemical_element, Polarization (waves), Atomic and Molecular Physics, and Optics, Wavelength, chemistry, Splitter, Insertion loss, Optoelectronics, Electrical and Electronic Engineering, Photonics, business, Electron-beam lithography

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::b10c50c6a1601ef2d8f8b3645efa1878
https://doi.org/10.1109/jphot.2021.3091539

المؤلفون: Inki Kim, Yeon Sik Jung, Cheng-Wei Qiu, Chenglong Hao, Jungho Mun, Junsuk Rho, Kwang Min Baek, Minkyung Kim

المصدر: Materials Today. 39:89-97

مصطلحات موضوعية: Electromagnetic field, Physics, Photon, business.industry, Proximity effect (electron beam lithography), Mechanical Engineering, Physics::Optics, 02 engineering and technology, 010402 general chemistry, 021001 nanoscience & nanotechnology, Condensed Matter Physics, 01 natural sciences, 0104 chemical sciences, Radius of curvature (optics), Mechanics of Materials, Cascade, Optoelectronics, General Materials Science, 0210 nano-technology, business, Lithography, Electron-beam lithography, Plasmon

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::f6b32452d4d98f264279eea964d560b5
https://doi.org/10.1016/j.mattod.2020.06.002

المؤلفون: Chuanzhen Zhao, Jiabao Wang, Wenfei Liu, Xiaobin Xu, Xiuzhen Xu, Paul S. Weiss

المصدر: ACS Nano. 15:12180-12188

مصطلحات موضوعية: Nanostructure, Materials science, business.industry, General Engineering, General Physics and Astronomy, Photodetector, 02 engineering and technology, Photoresist, 010402 general chemistry, 021001 nanoscience & nanotechnology, 01 natural sciences, 0104 chemical sciences, law.invention, Nanolithography, law, Extreme ultraviolet, Optoelectronics, General Materials Science, Photolithography, 0210 nano-technology, business, Lithography, Electron-beam lithography

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::e9d6a1cc6d6c8734e03a9a126ebcbe29
https://doi.org/10.1021/acsnano.1c03703