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1
المصدر: Langmuir. 37:2683-2692
مصطلحات موضوعية: Materials science, Thermal resistance, Condensation, 02 engineering and technology, Surfaces and Interfaces, 010402 general chemistry, 021001 nanoscience & nanotechnology, Condensed Matter Physics, 01 natural sciences, 0104 chemical sciences, law.invention, law, Amphiphile, Electrochemistry, Deep reactive-ion etching, General Materials Science, Wetting, Photolithography, Composite material, 0210 nano-technology, Environmental scanning electron microscope, Spectroscopy, Microfabrication
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2
المؤلفون: Martin Drost, Steffen Marschmeyer, Mirko Fraschke, Oksana Fursenko, Florian Bärwolf, Ioan Costina, Mamathamba Kalishettyhalli Mahadevaiah, Marco Lisker
المصدر: Micro and Nano Engineering, Vol 14, Iss, Pp 100102-(2022)
مصطلحات موضوعية: TK7800-8360, Deep reactive ion etching, T1-995, Aluminum oxide, Electrical and Electronic Engineering, Electronics, Condensed Matter Physics, Atomic and Molecular Physics, and Optics, Bosch process, Technology (General), Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::35d7b8e4e2c2cd6a6ca59f0c050656a2
http://www.sciencedirect.com/science/article/pii/S259000722100023X -
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المؤلفون: Yu Caijia, Pu Chen, Wang Jian, Gang Wang, Xin Yan, Niu Haobin, Xiong Heng, Pengfei Li
المصدر: Microsystem Technologies. 27:3493-3497
مصطلحات موضوعية: 010302 applied physics, Materials science, Fabrication, Silicon, business.industry, chemistry.chemical_element, 02 engineering and technology, 021001 nanoscience & nanotechnology, Condensed Matter Physics, 01 natural sciences, Aspect ratio (image), Capacitance, Electronic, Optical and Magnetic Materials, Active layer, chemistry, Hardware and Architecture, 0103 physical sciences, Deep reactive-ion etching, Optoelectronics, Wafer, Vacuum level, Electrical and Electronic Engineering, 0210 nano-technology, business
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::5d4a74b7e8238e1be54629ecdf8e1a16
https://doi.org/10.1007/s00542-020-05185-x -
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المؤلفون: Mahanth Prasad, Vijay Janyani, Ashish Kumar, Rajendra Prasad Yadav
المصدر: IEEE Transactions on Semiconductor Manufacturing. 33:606-613
مصطلحات موضوعية: Microelectromechanical systems, 0209 industrial biotechnology, Bulk micromachining, Fabrication, Materials science, Silicon, business.industry, chemistry.chemical_element, 02 engineering and technology, Condensed Matter Physics, Industrial and Manufacturing Engineering, Electronic, Optical and Magnetic Materials, Surface micromachining, 020901 industrial engineering & automation, chemistry, Etching (microfabrication), Deep reactive-ion etching, Optoelectronics, Wafer, Electrical and Electronic Engineering, business
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المؤلفون: Ashok Kumar Pandey, Arnab Biswas, Vishal S. Pawar, P. Krishna Menon, Prem Pal
المصدر: Microsystem Technologies. 27:2679-2693
مصطلحات موضوعية: 010302 applied physics, Microelectromechanical systems, Plasma etching, Materials science, Passivation, business.industry, Vibrating structure gyroscope, Gyroscope, 02 engineering and technology, 021001 nanoscience & nanotechnology, Condensed Matter Physics, 01 natural sciences, Electronic, Optical and Magnetic Materials, law.invention, Hardware and Architecture, Comb drive, law, Etching (microfabrication), 0103 physical sciences, Deep reactive-ion etching, Optoelectronics, Electrical and Electronic Engineering, 0210 nano-technology, business
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المؤلفون: Matias Kagias, Vitaliy A. Guzenko, Marco Stampanoni, Konstantins Jefimovs, Zhentian Wang, Christian David
المصدر: Materials Science in Semiconductor Processing, 92
مصطلحات موضوعية: 010302 applied physics, Materials science, Fabrication, Silicon, X-ray interferometry, Grating fabrication, Deep reactive ion etching, Electroplating, business.industry, Mechanical Engineering, X-ray, chemistry.chemical_element, 02 engineering and technology, Grating, 021001 nanoscience & nanotechnology, Condensed Matter Physics, 01 natural sciences, chemistry, Mechanics of Materials, 0103 physical sciences, Deep reactive-ion etching, Optoelectronics, General Materials Science, 0210 nano-technology, business, Absorption (electromagnetic radiation), Microfabrication
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المؤلفون: Yoshio Mita, Yuki Okamoto, R Ranga Reddy
المصدر: IEEE Transactions on Semiconductor Manufacturing. 33:187-195
مصطلحات موضوعية: Microelectromechanical systems, 0209 industrial biotechnology, Materials science, Silicon on insulator, 02 engineering and technology, Tribology, Condensed Matter Physics, Industrial and Manufacturing Engineering, Electronic, Optical and Magnetic Materials, 020901 industrial engineering & automation, Deep reactive-ion etching, Dynamical friction, Wafer, Electrical and Electronic Engineering, Composite material, Contact area, Asperity (materials science)
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المؤلفون: Joel D. Brock, David N. Agyeman-Budu, Arthur R. Woll
المصدر: Powder Diffraction. 35:S3-S7
مصطلحات موضوعية: 0303 health sciences, Radiation, Photon, Materials science, Silicon, 010308 nuclear & particles physics, business.industry, 030303 biophysics, chemistry.chemical_element, Condensed Matter Physics, 01 natural sciences, 03 medical and health sciences, chemistry.chemical_compound, Optics, Silicon nitride, chemistry, Transmission (telecommunications), 0103 physical sciences, Deep reactive-ion etching, General Materials Science, business, High-pass filter, Instrumentation, Beam (structure), Microfabrication
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المؤلفون: Xiaowei Shan, James Richard Forbes, Jorge Angeles
المصدر: Microsystem Technologies. 26:2639-2648
مصطلحات موضوعية: 010302 applied physics, Materials science, Plane (geometry), Acoustics, Isotropy, Stiffness, 02 engineering and technology, 021001 nanoscience & nanotechnology, Condensed Matter Physics, 01 natural sciences, Finite element method, Electronic, Optical and Magnetic Materials, Vibration, Hardware and Architecture, 0103 physical sciences, medicine, Deep reactive-ion etching, Electrical and Electronic Engineering, medicine.symptom, 0210 nano-technology, Parallelogram, Microfabrication
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المؤلفون: Peter G. Huggard, Xiaobang Shang, Byron Alderman, Yi Wang, Jeff Powell, Hui Wang, Cheng Guo, Jun Xu, Yuvaraj Dhayalan, Michael J. Lancaster
المصدر: IEEE Transactions on Microwave Theory and Techniques. 68:1035-1044
مصطلحات موضوعية: Waveguide filter, Radiation, Materials science, business.industry, Schottky diode, 020206 networking & telecommunications, 02 engineering and technology, Dissipation, Condensed Matter Physics, law.invention, Thermal conductivity, law, 0202 electrical engineering, electronic engineering, information engineering, Return loss, Deep reactive-ion etching, Optoelectronics, Electrical and Electronic Engineering, Photolithography, business, Diode