المؤلفون: Sui, Fanping, Guo, Ruiqi, Yue, Wei, Behrouzi, Kamyar, Lin, Liwei

المصدر: 2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS) Micro Electro Mechanical Systems Conference (MEMS), 2022 IEEE 35th International Conference on. :450-453 Jan, 2022

Relation: 2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS)