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المصدر: Journal of Physics: Conference Series. 100:042014
مصطلحات موضوعية: History, Materials science, Silicon, Annealing (metallurgy), Aluminium nitride, Metallurgy, chemistry.chemical_element, Nitride, Computer Science Applications, Education, chemistry.chemical_compound, chemistry, Silicide, Surface roughness, Nanometre, Thin film, Composite material