-
1
المؤلفون: William John Patrick, Roy A. Carruthers, Kurt Olsen, Geraldine Cogin Schwartz, Jonathan D. Chapple‐Sokol
المصدر: Journal of The Electrochemical Society. 139:2604-2613
مصطلحات موضوعية: Permittivity, Silicon, Renewable Energy, Sustainability and the Environment, Silicon dioxide, Mineralogy, chemistry.chemical_element, Dielectric, Condensed Matter Physics, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, chemistry.chemical_compound, Carbon film, chemistry, Chemical engineering, Plasma-enhanced chemical vapor deposition, Materials Chemistry, Electrochemistry, Deposition (phase transition), Wafer
-
2
المؤلفون: J. Batey, E. Tierney, R. A. Conti, W. A. Pliskin, Jonathan D. Chapple-Sokol
المصدر: Journal of The Electrochemical Society. 138:3723-3726
مصطلحات موضوعية: inorganic chemicals, Renewable Energy, Sustainability and the Environment, Chemistry, Silicon dioxide, Mineralogy, Chemical vapor deposition, Condensed Matter Physics, Silane, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, law.invention, chemistry.chemical_compound, Chemical engineering, law, Impurity, Plasma-enhanced chemical vapor deposition, Materials Chemistry, Electrochemistry, Deposition (phase transition), Susceptor, Power density
-
3
المؤلفون: Carmen J. Giunta, Roy G. Gordon, Jonathan D. Chapple‐Sokol
المصدر: Journal of The Electrochemical Society. 137:3237-3253
مصطلحات موضوعية: chemistry.chemical_classification, Reaction mechanism, Renewable Energy, Sustainability and the Environment, Silicon dioxide, Inorganic chemistry, Nitrous oxide, Chemical vapor deposition, Condensed Matter Physics, Silane, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, chemistry.chemical_compound, chemistry, Plasma-enhanced chemical vapor deposition, Materials Chemistry, Electrochemistry, Disilane, Inorganic compound
-
4
المؤلفون: Carmen J. Giunta, Roy G. Gordon, Jonathan D. Chapple‐Sokol
المصدر: Journal of The Electrochemical Society. 136:2993-3003
مصطلحات موضوعية: Renewable Energy, Sustainability and the Environment, Inorganic chemistry, Oxide, Nitrous oxide, Chemical vapor deposition, Condensed Matter Physics, Silane, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, Chemical kinetics, chemistry.chemical_compound, chemistry, Materials Chemistry, Electrochemistry, Physical chemistry, Disilane, Deposition (chemistry), Stoichiometry