-
1
المؤلفون: Erin Crisp, Andrew Blakers, Maureen Brauers, Shakir Rahman, Katherine Booker, Klaus Weber, Matthew Stocks
المصدر: Journal of Micromechanics and Microengineering. 24:125026
مصطلحات موضوعية: Materials science, Silicon, business.industry, Mechanical Engineering, chemistry.chemical_element, Nanotechnology, Isotropic etching, Electronic, Optical and Magnetic Materials, chemistry, Mechanics of Materials, Etching (microfabrication), Surface roughness, Deep reactive-ion etching, Optoelectronics, Wafer, Dry etching, Electrical and Electronic Engineering, Reactive-ion etching, business