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المصدر: Surface and Interface Analysis. 44:1572-1581
مصطلحات موضوعية: Materials science, Silicon, Scanning electron microscope, Analytical chemistry, Energy-dispersive X-ray spectroscopy, chemistry.chemical_element, Surfaces and Interfaces, General Chemistry, Condensed Matter Physics, Surfaces, Coatings and Films, X-ray photoelectron spectroscopy, chemistry, Attenuated total reflection, Materials Chemistry, Organic chemistry, Surface layer, Fourier transform infrared spectroscopy, UV degradation