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المؤلفون: M. Guillorn, Deqiang Wang, Steve Rossnagel, Lynne Gignac, Qinghuang Lin, Sung-Wook Nam, Ajay K. Royyuru, Robert L. Bruce, Gustavo Stolovitzky, P. J. Litwinowicz, Armand Galan, Dirk Pfeiffer, Evan G. Colgan, Ronald D. Goldblatt, S. Papa Rao, J.J. Bucchignano, Markus Brink, Michael F. Lofaro, Chao Wang, W. H. Advocate, Elizabeth A. Duch, E. Kratschmer, C. M. Breslin, John M. Cotte, William Henry Price, Christopher V. Jahnes, Stas Polonsky, Hongbo Peng, Eric A. Joseph
المصدر: 2013 IEEE International Electron Devices Meeting.
مصطلحات موضوعية: Materials science, Wafer-scale integration, Silicon, technology, industry, and agriculture, chemistry.chemical_element, Nanofluidics, Nanotechnology, Lab-on-a-chip, law.invention, chemistry.chemical_compound, chemistry, Optical microscope, law, Fluorescence microscope, Molecule, DNA
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::7009e4a7a92742f8a8752e24815c32d7
https://doi.org/10.1109/iedm.2013.6724627 -
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المؤلفون: W. Lai, Steven J. Holmes, Werner A. Rausch, Allen H. Gabor, Karl Paul Muller, Colin J. Brodsky, Ernest Y. Wu, Jeffrey J. Welser, Sujatha Sankaran, Ricardo A. Donaton, S. Wu, Ronald A. DellaGuardia, S.K.H. Fung, W. Yan, S.H. Ku, Steven W. Mittl, Anthony I. Chou, A. Vayshenker, J. Snare, Paul D. Agnello, Len Y. Tsou, Mukesh Khare, Michael A. Gribelyuk, Renee T. Mo, Robert J. Purtell, F. Jamin, P.A. McFarland, Akihisa Sekiguchi, D. Nielsen, D. Wehella-Gamage, Ronald D. Goldblatt, E. Barth, Richard A. Ferguson, Tina Wagner, Dominic J. Schepis, Shreesh Narasimha, Woo-Hyeong Lee, Bruce B. Doris, Percy V. Gilbert, Stephen E. Greco, X. Chen, Sadanand V. Deshpande, Yujun Li
المصدر: Digest. International Electron Devices Meeting.
مصطلحات موضوعية: Interconnection, Materials science, Silicon, business.industry, Gate dielectric, Copper interconnect, Electrical engineering, Silicon on insulator, chemistry.chemical_element, Hardware_PERFORMANCEANDRELIABILITY, Integrated circuit design, Dielectric, Stack (abstract data type), chemistry, Hardware_INTEGRATEDCIRCUITS, Optoelectronics, business
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::a76288235c918aa108b3bc11283b3430
https://doi.org/10.1109/iedm.2002.1175865