المؤلفون: Fieldhouse, N., Pursel, S. M., Carey, R., Horn, M. W., Bharadwaja, S. S. N.

المصدر: Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; Jul2009, Vol. 27 Issue 4, p951-955, 5p, 3 Diagrams, 2 Charts, 2 Graphs

مصطلحات موضوعية: VANADIUM oxide, THIN films, SPUTTERING (Physics), SUBSTRATES (Materials science), CONSTITUTION of matter, TEMPERATURE