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المؤلفون: L. Hänsel, Jörg Heber, Dirk Rudloff, Markus Eckert, Jan-Uwe Schmidt, S. Frances, H. Torlee, Andreas Gehner, W. Pufe, Sebastian Döring, Matthias Schulze, Andreas Elgner, Martin Friedrichs, Christoph Hohle, Michael Wagner, Peter Dürr, Detlef Kunze
المصدر: MOEMS and Miniaturized Systems XIX.
مصطلحات موضوعية: Surface micromachining, Tilt (optics), CMOS, Backplane, business.industry, Computer science, Electrical engineering, Hinge, Electronics, Frame rate, business, Actuator
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::86b042b6a78b3a5dfe0f1d222f1f6a02
https://doi.org/10.1117/12.2543052 -
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المؤلفون: Michael Wagner, C. Skupsch, Dirk Rudloff, Jan-Uwe Schmidt, Andreas Elgner, Jörg Heber, Mark Eckert, Matthias Schulze, Detlef Kunze, H. Torlee, Andreas Gehner, Martin Friedrichs, S. Frances, Sebastian Döring, W. Pufe, Christoph Hohle, Peter Dürr
المصدر: 2018 International Conference on Optical MEMS and Nanophotonics (OMN).
مصطلحات موضوعية: Physics, Optics, Tilt (optics), Pixel, CMOS, business.industry, Scalability, Micro mirror, Process (computing), Actuator, business, Cmos compatible
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::60132296c04a69d51fb44ce9fd000b0e
https://doi.org/10.1109/omn.2018.8454624 -
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المؤلفون: Fredrik Jonsson, Michael Wagner, Martin Friedrichs, Thomas Hughes, Thomas Ludewig, Peter Duerr, Peter Bjoernangen, Jan-Uwe Schmidt, Torbjörn Sandström, Ulrike Dauderstaedt, Andreas Bergstrom, Daniela Trenkler, Ingo Wullinger, Tino Schwaten, Tord Karlin, Dirk Rudloff, Peter Ronnholm
المصدر: SPIE Proceedings.
مصطلحات موضوعية: Materials science, Spatial light modulator, Pixel, business.industry, Laser, Multiplexing, law.invention, Optics, Modulation, law, Ultraviolet light, Optoelectronics, Integrated circuit packaging, business, Throughput (business)
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::373c208068d97d910b480f58ff477adf
https://doi.org/10.1117/12.2036533 -
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المؤلفون: Dirk Rudloff, Mark Eckert, Jan-Uwe Schmidt, Hubert Lakner, Steffen Sinning, Dirk Berndt, Steffen Wolschke, Jörg Heber, Martin Bring, Michael Wagner
المصدر: International Symposium on Photoelectronic Detection and Imaging 2011: Sensor and Micromachined Optical Device Technologies.
مصطلحات موضوعية: Microelectromechanical systems, Materials science, Dynamic range, business.industry, Near-infrared spectroscopy, Laser, 01 natural sciences, law.invention, 010309 optics, Semiconductor, Optics, Deflection (engineering), law, 0103 physical sciences, Microscopy, Profilometer, business
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::56beeb608398b7324562931c0a5e57d6
https://doi.org/10.1117/12.899881 -
5
المؤلفون: Dirk Rudloff, Detlef Kunze, Martin Friedrichs, Hubert Lakner, Martin Bring, Wolfram Kluge, Jan-Uwe Schmidt, Dirk Berndt, Jana Rössler, Michael Wagner, Hannes Neumann, Jörg Heber, Steffen Sinning, Jens Knobbe, Mark Eckert
المصدر: SPIE Proceedings.
مصطلحات موضوعية: Physics, Wavelength range, business.industry, Near-infrared spectroscopy, Multispectral image, 02 engineering and technology, Technology development, 021001 nanoscience & nanotechnology, Contrast imaging, Grey scale, 01 natural sciences, law.invention, 010309 optics, Optics, Achromatic lens, law, 0103 physical sciences, Systems design, 0210 nano-technology, business
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::534be97f1a88c3556dcc8e25a9099158
https://doi.org/10.1117/12.854382 -
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المؤلفون: Dirk Rudloff, Michael Wagner, Peter Dürr, Mathias Krellmann, Ulrike Dauderstädt, Detlef Kunze, Klaus Lukat, Ingo Wullinger, Aravind Narayana Samy
المصدر: SPIE Proceedings.
مصطلحات موضوعية: Microelectromechanical systems, Wavefront, Materials science, Physics::Instrumentation and Detectors, business.industry, Laser, Pulse shaping, Temperature measurement, law.invention, Optics, law, Resistor, Photonics, Air gap (plumbing), business
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::a5108ffac8fc57861e96fc5f73f12042
https://doi.org/10.1117/12.842066 -
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المؤلفون: Peter Björnängen, Dirk Rudloff, Michael Wagner, Per Askebjer, Michael Müller, Peter Dürr, Matthias List, Jan-Uwe Schmidt, Martin Friedrichs, Ulrike Dauderstädt
المصدر: SPIE Proceedings.
مصطلحات موضوعية: Spatial light modulator, Fabrication, Materials science, business.industry, Laser, law.invention, Optics, law, Chemical-mechanical planarization, Photolithography, business, Actuator, Layer (electronics), Lithography
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::0a73b209a7bd59886318e9abae3a5a9f
https://doi.org/10.1117/12.810787 -
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المؤلفون: Jan-Uwe Schmidt, Martin Friedrichs, Dirk Rudloff, Benjamin Voelker, Thor Bakke, Hubert Lakner
المصدر: SPIE Proceedings.
مصطلحات موضوعية: Microelectromechanical systems, Materials science, Spatial light modulator, Fabrication, Optics, CMOS, Wafer bonding, business.industry, Adaptive optics, Actuator, business, Lithography
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::4c36d7e4b964a97e7fc1b360c3df52c3
https://doi.org/10.1117/12.787015 -
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المؤلفون: T. Sandström, Michael Wagner, D. Kunze, P. Dürr, U. Berzinsh, J. Luberek, Dirk Rudloff, P. Björnängen, T. Karlin, J. Heber
المصدر: SPIE Proceedings.
مصطلحات موضوعية: Microelectromechanical systems, Engineering, Spatial light modulator, Optics, law, business.industry, Point (geometry), Contrast (music), Photolithography, business, Lithography, law.invention
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::4edf3882089c2237c95c4e50da56e097
https://doi.org/10.1117/12.747015 -
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المؤلفون: Benjamin Völker, Dirk Rudloff, Harald Schenk, Hubert Lakner, Martin Friedrichs, Thor Bakke
المصدر: SPIE Proceedings.
مصطلحات موضوعية: Materials science, Silicon, Wafer bonding, business.industry, chemistry.chemical_element, Silicon on insulator, Monocrystalline silicon, Surface micromachining, Optics, chemistry, Anodic bonding, Wafer, Dry etching, business
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::0b8e6fdcd59e6face4603ab3b73bfec5
https://doi.org/10.1117/12.646182