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المؤلفون: Taro OGATA, Yasuko KUWATA, Hideki OMURO, Nobuhiro HASEGAWA
المصدر: Journal of Japan Association for Earthquake Engineering. 23:2_23-2_39
مصطلحات موضوعية: General Medicine
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::9ceab183cd52a4a37118658611757f0d
https://doi.org/10.5610/jaee.23.2_23 -
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المؤلفون: Kenta Suzuki, Hiroshi Irihama, Tomoyuki Matsuyama, Daiyu Fujii, Taro Ogata, Yukio Koizumi, Hisashi Nishinaga, Hajime Yamamoto, Yohei Fujishima, Toru Hirayama, Ryoichi Kawaguchi
المصدر: SPIE Proceedings.
مصطلحات موضوعية: Wavefront, business.industry, Computer science, ComputingMethodologies_IMAGEPROCESSINGANDCOMPUTERVISION, law.invention, Lens (optics), Optical scanners, Optics, law, Multiple patterning, Reticle, Electronic engineering, Image sensor, business, Aerial image, Immersion lithography
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::0c3048c2562a8e63a56df4754b551dc0
https://doi.org/10.1117/12.2046640 -
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المؤلفون: Tomoyuki Matsuyama, Toshiharu Nakashima, Masayuki Murayama, Hajime Yamamoto, Katsushi Makino, Ayako Sukegawa, Naonori Kita, Kazuo Masaki, Shintaro Kudo, Junji Ikeda, Hajime Aoyama, Ryota Matsui, Taro Ogata
المصدر: SPIE Proceedings.
مصطلحات موضوعية: Lens (optics), Scanner, Optics, law, business.industry, Computer science, Computational lithography, Reticle, Electronic engineering, Process window, business, Lithography, law.invention
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::002b098c421495278258d9ef6e6e8e65
https://doi.org/10.1117/12.2046547 -
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المؤلفون: Tomoyuki Matsuyama, Ryota Matsui, Taro Ogata, Hajime Aoyama, Shinichi Mori
المصدر: SPIE Proceedings.
مصطلحات موضوعية: Optics, business.industry, Computational lithography, Computer science, Distortion (optics), Multiple patterning, Overlay, Sensitivity (control systems), business, Focus (optics), Lithography, Immersion lithography
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::91683a55eae9748af5338abfc067b8e9
https://doi.org/10.1117/12.2011382 -
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المؤلفون: Hajime Aoyama, Takuya Kono, Tomoyuki Matsuyama, Akiko Mimotogi, Kazuya Fukuhara, Naonori Kita, Taro Ogata
المصدر: SPIE Proceedings.
مصطلحات موضوعية: Physics, Diffraction, Contrast transfer function, business.industry, law.invention, Lens (optics), Optics, law, Chromatic aberration, Thermal, business, Refractive index, Lithography, Immersion lithography
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::2b98c644452baede3ad400b50c04e28f
https://doi.org/10.1117/12.2011691 -
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المؤلفون: Taro Ogata, Osamu Mitomi, Kuminori Shinada, Kiyotoshi Iimura, Sadao Aoki, Yasuji Yoshidomi
المصدر: Journal of Electron Spectroscopy and Related Phenomena. 80:357-360
مصطلحات موضوعية: Soft x ray, Radiation, Microscope, Materials science, business.industry, Environmental chamber, Analytical chemistry, Plasma, Condensed Matter Physics, Laser, Atomic and Molecular Physics, and Optics, Electronic, Optical and Magnetic Materials, law.invention, Biological specimen, Optics, law, Physical and Theoretical Chemistry, business, Image resolution, Spectroscopy, Incidence (geometry)
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المؤلفون: Taro Ogata, Yasuhiro Ohmura, Tomoyuki Matsuyama, Yasushi Mizuno
المصدر: SPIE Proceedings.
مصطلحات موضوعية: Generation process, Reduction (complexity), Scanner, Optics, Computer science, Feature (computer vision), business.industry, Process (computing), business, Lithography
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::9c065617004b9187b402d23396e3809d
https://doi.org/10.1117/12.916588 -
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المؤلفون: Susumu Isago, Hidetaka Kawahara, Takeshi Shiota, Hisashi Nishinaga, Satoshi Ishiyama, Tomoyuki Matsuyama, Taro Ogata, Yasuhiro Ohmura, Toru Hirayama
المصدر: SPIE Proceedings.
مصطلحات موضوعية: Wavefront, Physics, Simple lens, Semiconductor device fabrication, business.industry, Deformable mirror, law.invention, Lens Controller, Lens (optics), Optics, law, Thermal, business, Lithography
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::46db80fe3543bea8c399e9152af84e53
https://doi.org/10.1117/12.879616 -
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المؤلفون: Hisashi Nishinaga, Yusaku Uehara, Tomoyuki Matsuyama, Yasuhiro Ohmura, Taro Ogata, Toshiharu Nakashima
المصدر: Optical Microlithography XXI.
مصطلحات موضوعية: Temperature control, business.industry, Computer science, Compensation (engineering), law.invention, Lens Controller, Optics, law, Thermal, Projection lens, Photolithography, business, Constant (mathematics), Throughput (business)
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::87db8579fccfcee604928e2751d97c7a
https://doi.org/10.1117/12.772586 -
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المؤلفون: Tomoyuki Matsuyama, Toshiharu Nakashima, Yasuhiro Ohmura, Slava Rokitski, Hisashi Nishinaga, James Bonafede, Taro Ogata, Yusaku Uehara, Tsuyoshi Toki, Hironori Ikezawa
المصدر: Optical Microlithography XXI.
مصطلحات موضوعية: Lens (optics), Scanner, Optics, law, Computer science, business.industry, Electronic engineering, Multiple patterning, Photolithography, business, law.invention, Metrology
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::1822276fd2c39570b65fa2cd37850e88
https://doi.org/10.1117/12.771942