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1دورية أكاديمية
المؤلفون: Shan, Hongching, Lee, Evans, Welch, Michael, Pu, Bryan, Carducci, James, Ke, Kuang-Han, Gao, Hua, Luscher, Paul, Crean, Gerard, Wang, Rynn, Blume, Richard, Cooper, James, Wu, Robert
المصدر: Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 1996, Vol. 14 Issue 2, p716-723, 8p