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المؤلفون: Scott Goad, Peter D. Buck, Jürgen Preuninger, Martin Blöcker, Richard Gladhill, Russell Cinque, Christopher A. Spence, Üwe Griesinger
المصدر: 22nd European Mask and Lithography Conference.
مصطلحات موضوعية: Engineering, Resolution enhancement technologies, business.industry, Volume (computing), File size, Optical proximity correction, Embedded system, Data file, Computer data storage, Hardware_INTEGRATEDCIRCUITS, File transfer, business, Computer hardware, Dram
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::16a15703e7e7e45bd4be2595def84ece
https://doi.org/10.1117/12.692639