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1مؤتمر
المؤلفون: Haggag, Amr, Liu, Ning, Abramowitz, Peter, Moosa, Mohamed, Anderson, Gary, Burnett, David, Parihar, Sanjay, Abeln, Glenn, Higman, Jack
المصدر: 2010 IEEE International Reliability Physics Symposium Reliability Physics Symposium (IRPS), 2010 IEEE International. :1115-1116 May, 2010
Relation: 2010 IEEE International Reliability Physics Symposium (IRPS)
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2دورية أكاديمية
المصدر: IEEE Transactions on Semiconductor Manufacturing; Nov2003, Vol. 16 Issue 4, p653-655, 3p
مصطلحات موضوعية: ION implantation, ION bombardment, SEMICONDUCTORS, ELECTRONICS