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المؤلفون: Peter Dirksen, Augustus J. E. M. Janssen, Casper A. H. Juffermans, Ad Leeuwestein, Joseph J. M. Braat
المساهمون: Control Systems
المصدر: Proceedings Optical Microlithography XVI, 25-28 February 2003, Santa Clara, California, 1-10
STARTPAGE=1;ENDPAGE=10;TITLE=Proceedings Optical Microlithography XVI, 25-28 February 2003, Santa Clara, Californiaمصطلحات موضوعية: Point spread function, Materials science, business.industry, ComputingMethodologies_IMAGEPROCESSINGANDCOMPUTERVISION, Coma (optics), ComputerApplications_COMPUTERSINOTHERSYSTEMS, Astigmatism, medicine.disease, law.invention, Lens (optics), Spherical aberration, Optics, law, medicine, Wafer, Pinhole (optics), Photolithography, business
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::f2552cc662a14792d520e23c211f1b4c
https://doi.org/10.1117/12.485388 -
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المؤلفون: Ad Leeuwestein, Tomoyuki Matsuyama, Peter Dirksen, Augustus J. E. M. Janssen, Joseph J. M. Braat, Tomoya Noda
المساهمون: Control Systems
المصدر: Proceedings Optical Microlithography XIX, 21-24 February 2006, San Jose, California
Proceedings of SPIE, 2006 vol. 6154مصطلحات موضوعية: Point spread function, Engineering, business.industry, PMI, law.invention, Metrology, Numerical aperture, Lens (optics), Interferometry, Optics, law, extended Nijboer-Zernike theory, Astronomical interferometer, aberrations, optical lithography, Stepper, business, Aerial image
وصف الملف: application/pdf
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::7f0c367874a6c5497c03d40541b8fd8f
https://doi.org/10.1117/12.659428 -
3
المساهمون: Control Systems
المصدر: Proceedings of SPIE, 2004 vol. 5754
Proceedings Optical Microlithography XVIII, 1-4 March 2005, San Jose, California, 262-273
STARTPAGE=262;ENDPAGE=273;TITLE=Proceedings Optical Microlithography XVIII, 1-4 March 2005, San Jose, Californiaمصطلحات موضوعية: Physics, Scanner, business.industry, Zernike polynomials, Scalar (physics), Function (mathematics), high NA, law.invention, Extended Nijboer-Zernike theory, Lens (optics), Matrix (mathematics), symbols.namesake, Optics, law, symbols, point-spread function, vectorial diffraction formalism, Point (geometry), optical lithography, Photolithography, business
وصف الملف: application/pdf
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::d98ef4cc146c66e7230f13081740599c
http://resolver.tudelft.nl/uuid:9b17f08c-0748-4175-b4b4-2365304ae004 -
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المؤلفون: H Kwinten, David Van Steenwinckel, Ad Leeuwestein, Joseph J. M. Braat, Peter Dirksen, Augustus J. E. M. Janssen
المساهمون: Control Systems
المصدر: Proceedings Optical Microlithography XVII, 24-27 January 2004, Santa Clara, California, 150-159
STARTPAGE=150;ENDPAGE=159;TITLE=Proceedings Optical Microlithography XVII, 24-27 January 2004, Santa Clara, California
Proceedings of SPIE, 2004 vol. 5377مصطلحات موضوعية: Point spread function, Materials science, Zernike polynomials, business.industry, Horizontal plane, Extended Nijboer-Zernike theory, law.invention, symbols.namesake, Optics, Resist, Feature (computer vision), law, resist, point-spread function, symbols, optical lithography, diffusion constant, Photolithography, business, Focus (optics), focus noise, Aerial image
وصف الملف: application/pdf
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::16f824b8860cac4340bd3fa224a8fce9
https://research.tue.nl/en/publications/c7ed4cc5-826b-4e7d-b569-db3bb0cbe25e -
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