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المؤلفون: Ji-Young Im, Inanami Ryoichi, Motofumi Komori, Masayuki Hatano, Akiko Mimotogi, Sachiko Kobayashi, Kyoji Yamashita, Takuya Kono, Shimon Maeda
المصدر: SPIE Proceedings.
مصطلحات موضوعية: 010302 applied physics, Fabrication, Computer science, Computational lithography, Nanotechnology, 02 engineering and technology, 021001 nanoscience & nanotechnology, 01 natural sciences, Nanoimprint lithography, law.invention, Design for manufacturability, Resist, law, 0103 physical sciences, Hardware_INTEGRATEDCIRCUITS, Multiple patterning, Electronic engineering, Process simulation, 0210 nano-technology, Next-generation lithography
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::c58aa48eb3797320b4dc7d349259f9b5
https://doi.org/10.1117/12.2219052 -
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المؤلفون: Shoji Mimotogi, Sato Takashi, Ayako Endo, Satoshi Tanaka, Akiko Mimotogi, Kazuya Sato
المصدر: Japanese Journal of Applied Physics. 45:5391-5395
مصطلحات موضوعية: Diffraction, Materials science, Physics and Astronomy (miscellaneous), business.industry, General Engineering, Phase (waves), General Physics and Astronomy, Diffraction efficiency, Numerical aperture, Optics, Resist, Transmittance, Phase-shift mask, business, Lithography
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3
المؤلفون: Hajime Aoyama, Takuya Kono, Tomoyuki Matsuyama, Akiko Mimotogi, Kazuya Fukuhara, Naonori Kita, Taro Ogata
المصدر: SPIE Proceedings.
مصطلحات موضوعية: Physics, Diffraction, Contrast transfer function, business.industry, law.invention, Lens (optics), Optics, law, Chromatic aberration, Thermal, business, Refractive index, Lithography, Immersion lithography
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::2b98c644452baede3ad400b50c04e28f
https://doi.org/10.1117/12.2011691 -
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المؤلفون: Satoshi Tanaka, Takashi Sato, Kazuya Sato, Shoji Mimotogi, Akiko Mimotogi, Masamitsu Itoh
المصدر: Optical Microlithography XXI.
مصطلحات موضوعية: Materials science, High-refractive-index polymer, business.industry, Extreme ultraviolet lithography, Numerical aperture, law.invention, Optics, law, Transmittance, Photolithography, business, Refractive index, Lithography, Immersion lithography
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::a2178ff739313a0f592ea37c62eb80e7
https://doi.org/10.1117/12.772283 -
5
المؤلفون: Sato Takashi, Masamitsu Itoh, Akiko Mimotogi, Shoji Mimotogi, Kazuya Sato, Satoshi Tanaka
المصدر: SPIE Proceedings.
مصطلحات موضوعية: Diffraction, Physics, business.industry, Phase (waves), Geometry, law.invention, Numerical aperture, Amplitude, Optics, law, Node (physics), Photolithography, business, Focus (optics), Lithography
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::d2e971cac75f89bf1fb465330f88fe58
https://doi.org/10.1117/12.728963 -
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المؤلفون: Shigenori Tanaka, Akiko Mimotogi, Soichi Inoue, Shoji Mimotogi, Kohji Hashimoto, Masaki Satake
المصدر: SPIE Proceedings.
مصطلحات موضوعية: Engineering, business.industry, law.invention, Optics, Optical proximity correction, law, Proximity effect (audio), Miniaturization, Phase-shift mask, Wafer, Node (circuits), business, Waveguide, Lithography
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::d7d591b0ac2470dc9eefe43429139e99
https://doi.org/10.1117/12.681874 -
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المؤلفون: Shoji Mimotogi, Kazuya Sato, Akiko Mimotogi, Satoshi Tanaka, Ayako Endo, Sato Takashi
المصدر: Optical Microlithography XVIII.
مصطلحات موضوعية: Wavelength, Light intensity, Materials science, Optics, Light source, Polarization rotator, business.industry, Perpendicular, Optoelectronics, Phase-shift mask, business, Polarization (waves), Lithography
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::8275176ace607a646d772a4e0f735519
https://doi.org/10.1117/12.598458 -
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المؤلفون: Akiko Mimotogi, Satoshi Tanaka, Soichi Inoue
المصدر: Optical Microlithography XVIII.
مصطلحات موضوعية: Diffraction, Engineering, Wavelength, Optics, business.industry, Optical engineering, Scalar (mathematics), Reticle, Magnification, business, Lithography, Immersion lithography
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::60d51ab694d489f4ba33acf5a3d52633
https://doi.org/10.1117/12.600447 -
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المؤلفون: Takashi Sato, Shoji Mimotogi, Ayako Endo, Akiko Mimotogi, Satoshi Tanaka, Kazuya Sato
المصدر: Journal of Micro/Nanolithography, MEMS, and MOEMS. 5:043001
مصطلحات موضوعية: Materials science, business.industry, Mechanical Engineering, Astrophysics::Instrumentation and Methods for Astrophysics, Condensed Matter Physics, Polarization (waves), Atomic and Molecular Physics, and Optics, Electronic, Optical and Magnetic Materials, Numerical aperture, Optics, Transmittance, Phase-shift mask, Optoelectronics, Electrical and Electronic Engineering, Photomask, business, Exposure latitude, Lithography, Immersion lithography
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::f55e328badc2c8262fd7fbfcd97aeb94
https://doi.org/10.1117/1.2397065