-
1دورية أكاديمية
المؤلفون: Alain E. Kaloyeros, Jonathan Goff, Barry Arkles
المصدر: Electronic Materials, Vol 3, Iss 1, Pp 27-40 (2022)
مصطلحات موضوعية: silicon carbide, SiC, chemical vapor deposition, CVD, thin film, organosilicon, Instruments and machines, QA71-90
وصف الملف: electronic resource
-
2دورية أكاديمية
المصدر: Micromachines, Vol 2, Iss 1, Pp 1-16 (2011)
مصطلحات موضوعية: peptides, assembly, adhesion, Mechanical engineering and machinery, TJ1-1570
وصف الملف: electronic resource
-
3
المؤلفون: Barry C. Arkles, Jonathan D. Goff, Alain E. Kaloyeros, Chad Brick
المصدر: ECS Transactions. 98:121-135
مصطلحات موضوعية: chemistry.chemical_classification, Adsorption, Materials science, chemistry, X-ray photoelectron spectroscopy, Remote plasma, Analytical chemistry, Deposition (phase transition), Substrate (electronics), Polymer, Plasma, Thin film
-
4
المؤلفون: Barry Arkles, Chad Brick, Jonathan Goff, Alain E. Kaloyeros
المصدر: Journal of Vacuum Science & Technology B. 40:040601
مصطلحات موضوعية: Thin Film Deposition, Process Chemistry and Technology, Silicon Nitride, Materials Chemistry, Electrical and Electronic Engineering, Thin Film Dielectrics, Instrumentation, Chemical Vapor Deposition (CVD), Organosilicon, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials
-
5
المؤلفون: Alain E. Kaloyeros, Barry C. Arkles, Fernando Jove, Jonathan D. Goff, Youlin Pan
المصدر: Inorganic Chemistry. 58:3050-3057
مصطلحات موضوعية: Epitaxial Deposition, 010405 organic chemistry, Reactive intermediate, Doping, Silylene, chemistry.chemical_element, Germanium, Chemical vapor deposition, Strained Silicon, 010402 general chemistry, Epitaxy, 01 natural sciences, 0104 chemical sciences, Polysilanes, Inorganic Chemistry, chemistry.chemical_compound, Isotetrasilane, chemistry, Deposition (phase transition), Physical chemistry, Physical and Theoretical Chemistry, Thin film
-
6
المؤلفون: Jonathan D. Goff, Barry C. Arkles, Youlin Pan, Alain E. Kaloyeros
المصدر: ECS Journal of Solid State Science and Technology. 8:P119-P152
مصطلحات موضوعية: Materials science, chemistry, chemistry.chemical_element, Nanotechnology, Thin film, Cobalt, Electronic, Optical and Magnetic Materials
-
7
المؤلفون: Barry C. Arkles, Alain E. Kaloyeros
المصدر: ECS Meeting Abstracts. :855-855
مصطلحات موضوعية: Zero (complex analysis), Thin film, Engineering physics, Process innovation
-
8
المؤلفون: Alain E. Kaloyeros, Jonathan D. Goff, Barry C. Arkles, Fernando Jove
المصدر: ECS Journal of Solid State Science and Technology. 6:P691-P714
مصطلحات موضوعية: 010302 applied physics, Materials science, Silicon, chemistry.chemical_element, Material system, Nanotechnology, 02 engineering and technology, 021001 nanoscience & nanotechnology, 01 natural sciences, Electronic, Optical and Magnetic Materials, chemistry.chemical_compound, Silicon nitride, chemistry, Physical vapor deposition, 0103 physical sciences, Thin film, 0210 nano-technology, Deposition (law)
-
9
المؤلفون: Barry C. Arkles, Alain E. Kaloyeros, Jonathan D. Goff
مصطلحات موضوعية: 010302 applied physics, Computer science, Process (engineering), Atomic Layer Deposition (ALD), 02 engineering and technology, 021001 nanoscience & nanotechnology, 01 natural sciences, Commercialization, Self-Assembled Monolayers (SAMs), Area Specific Deposition (ASD), Click-Chemistry Deposition (CCD), Near-Zero Thichkness Films, Semiconductor Fabrication, 0103 physical sciences, Electrochemistry, Systems engineering, 0210 nano-technology
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::397bbca96f97d7daee47d84853911d5b
-
10
المؤلفون: Chad Brick, Jonathan D. Goff, Alain E. Kaloyeros, Barry C. Arkles
المصدر: Thin Solid Films. 711:138299
مصطلحات موضوعية: 010302 applied physics, Materials science, Vapor pressure, Metals and Alloys, Analytical chemistry, 02 engineering and technology, Surfaces and Interfaces, Substrate (electronics), Chemical vapor deposition, 021001 nanoscience & nanotechnology, 01 natural sciences, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, chemistry.chemical_compound, X-ray photoelectron spectroscopy, Silicon nitride, chemistry, Ellipsometry, 0103 physical sciences, Materials Chemistry, Remote plasma, Thin film, 0210 nano-technology