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المؤلفون: Alan E. Rosenbluth
المصدر: SPIE Proceedings.
مصطلحات موضوعية: Image formation, Theoretical computer science, Computer science, Aperture, Structure (category theory), 02 engineering and technology, Classification of discontinuities, 021001 nanoscience & nanotechnology, 01 natural sciences, law.invention, Image (mathematics), 010309 optics, Lens (optics), Range (mathematics), law, 0103 physical sciences, Decomposition (computer science), 0210 nano-technology, Algorithm, Lithography
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::880b68227bafa76bbeeb148015a778b3
https://doi.org/10.1117/12.2261223 -
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المؤلفون: Ramya Viswanathan, Nihar R. Mohapatra, Pardeep Kumar, Ramana Murthy Pusuluri, Alan E. Rosenbluth, Babji Srinivasan
المصدر: Journal of Micro/Nanolithography, MEMS, and MOEMS. 17:1
مصطلحات موضوعية: Computational lithography, Computer science, Mechanical Engineering, Statistical model, Basis function, 02 engineering and technology, 021001 nanoscience & nanotechnology, Condensed Matter Physics, 01 natural sciences, Atomic and Molecular Physics, and Optics, Regression, Electronic, Optical and Magnetic Materials, Data modeling, 010309 optics, Autoregressive model, Optical proximity correction, Feature (computer vision), 0103 physical sciences, Electrical and Electronic Engineering, 0210 nano-technology, Algorithm
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::1b15a34c51576d3118d279353ab5bfcd
https://doi.org/10.1117/1.jmm.17.2.023503 -
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المؤلفون: Nihar R. Mohapatra, Pardeep Kumar, Babji Srinivasan, Alan E. Rosenbluth, Ramya Viswanathan
المصدر: 2015 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD).
مصطلحات موضوعية: Set (abstract data type), Engineering, Optical proximity correction, business.industry, Semiconductor device modeling, Calibration, Electronic engineering, Sample (statistics), business, Model building, Algorithm, Lithography, Data modeling
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::f4c27fef13c29b4bf19810257187d001
https://doi.org/10.1109/sispad.2015.7292348 -
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المؤلفون: Kenneth C. Ho, Teruhiro Nakasogi, Minhua Lu, Rama Nand Singh, Alan E. Rosenbluth
المصدر: Displays. 23:121-138
مصطلحات موضوعية: Physics, Liquid-crystal display, business.industry, Computation, Skew, engineering.material, Polarization (waves), Polarization mixing, law.invention, Human-Computer Interaction, Liquid crystal on silicon, Light valve, Optics, Coating, Hardware and Architecture, law, engineering, Electrical and Electronic Engineering, business
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المؤلفون: M. Lu, Derek B. Dove, Fuad E. Doany, Kei-Hsiung Yang, Rama Nand Singh, Alan E. Rosenbluth
المصدر: IBM Journal of Research and Development. 42:359-386
مصطلحات موضوعية: Physics, General Computer Science, Linear polarization, business.industry, Polarization (waves), Numerical aperture, law.invention, Wavelength, Dark state, Optics, Light valve, Liquid crystal, law, business, Beam splitter
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المؤلفون: Chandrasekhar Narayan, Eugene Stewart Schlig, Kenneth C. Ho, Kunio Enami, Evan G. Colgan, Raminderpal Singh, Fuad E. Doany, Derek B. Dove, J. L. Sanford, Kei-Hsiung Yang, Paul Matthew Alt, Alan E. Rosenbluth, Robert Lee Melcher, Thomas Mario Cipolla, Mitsuru Uda, Robert Stephen Olyha, Istvan Lovas, Carl G. Powell, T. Tomooka
المصدر: IBM Journal of Research and Development. 42:321-338
مصطلحات موضوعية: Engineering, Fabrication, General Computer Science, Pixel, business.industry, ComputingMethodologies_IMAGEPROCESSINGANDCOMPUTERVISION, Light valve, Computer graphics (images), Personal computer, Content (measure theory), Crystalline silicon, business, Projection (set theory), Diffuser (optics)
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المؤلفون: G. L.-T. Chiu, Alan E. Rosenbluth, Fuad E. Doany, Raminderpal Singh
المصدر: IBM Journal of Research and Development. 42:387-400
مصطلحات موضوعية: Materials science, General Computer Science, business.industry, Etendue, Diagonal, Physics::Optics, USable, Polarization (waves), Luminance, law.invention, Optics, Light source, Projector, law, Arc lamp, business
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المصدر: IBM Journal of Research and Development. 41:131-142
مصطلحات موضوعية: Microscope, Laser ablation, Materials science, General Computer Science, Excimer laser, business.industry, medicine.medical_treatment, Plane mirror, Substrate (printing), law.invention, Numerical aperture, Lens (optics), Optics, law, medicine, Optoelectronics, business, Lithography
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المصدر: IBM Journal of Research and Development. 41:39-48
مصطلحات موضوعية: Engineering, ComputerSystemsOrganization_COMPUTERSYSTEMIMPLEMENTATION, General Computer Science, business.industry, ComputingMethodologies_IMAGEPROCESSINGANDCOMPUTERVISION, Physics::Optics, ComputingMilieux_LEGALASPECTSOFCOMPUTING, GeneralLiterature_MISCELLANEOUS, Optics, High numerical aperture, IBM, Projection (set theory), business, Lithography, Hardware_LOGICDESIGN
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المؤلفون: Alan E. Rosenbluth, Jaione Tirapu Azpiroz
المصدر: 2013 SBMO/IEEE MTT-S International Microwave & Optoelectronics Conference (IMOC).
مصطلحات موضوعية: Materials science, business.industry, Computational lithography, Extreme ultraviolet lithography, law.invention, Optics, Resist, law, Microelectronics, Optoelectronics, X-ray lithography, Photolithography, business, Lithography, Next-generation lithography
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::c944159a89a12c5fc7a967299f702387
https://doi.org/10.1109/imoc.2013.6646420