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المؤلفون: Gian Francesco Lorusso, Danilo De Simone, Mohamed Zidan, Joren Severi, Alain Moussa, Bappaditya Dey, Sandip Halder, Alex Goldenshtein, Kevin Houchens, Gaetano Santoro, Daniel Fischer, Angelika Muellender, Chris Mack, Tsuyoshi Kondo, Tomoyasu Shohjoh, Masami Ikota, Anne-Laure Charley, Stefan De Gendt, Philippe Leray
المصدر: Japanese Journal of Applied Physics. 62:SG0808
مصطلحات موضوعية: General Engineering, General Physics and Astronomy
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المؤلفون: Gaetano Santoro, Kevin Houchens, Janusz Bogdanowicz, Moshe Elizov, Lior Yaron, Michael Chemama, Alex Goldenshtein, Amit Zakay, Noam Amit, Basoene Briggs, Antoine Pacco, Romain Delhougne, Andrew Cockburn, Yaniv Abramovitz, Aviram Tam, Ofer Adan, Hans Mertens, Anne-Laure Charley, Naoto Horiguchi, Philippe Leray, Gian F. Lorusso
المصدر: Metrology, Inspection, and Process Control XXXVI.
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::195e93429c6fd40ba22635775d2aeaee
https://doi.org/10.1117/12.2613771 -
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المؤلفون: Carol Boye, DukKyun Moon, Steven McDermott, Norbert Arnold, Nicole Saulnier, Felix Levitov, Sam Choi, Alex Goldenshtein, Uri Smolyan, Noam Amit, Injo Ok, Iqbal Saraf
المصدر: 2022 33rd Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC).
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::52bc90878a883049cac5651f227b2459
https://doi.org/10.1109/asmc54647.2022.9792525 -
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المؤلفون: Lior Shoval, Vladislav Kudriashov, Ilan Englard, Alon Litman, C. C. Lin, Ran Brikman, Greg Hughes, Alex Goldenshtein, Shmoolik Mangan
المصدر: SPIE Proceedings.
مصطلحات موضوعية: Wavelength, Optics, Materials science, business.industry, Extreme ultraviolet, Extreme ultraviolet lithography, Cathode ray, Electron beam processing, Optoelectronics, Mask inspection, Wafer, business, Reflectivity
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::b6c6fbc6b1d86eae23e4cd9fe426c492
https://doi.org/10.1117/12.898854 -
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المصدر: SPIE Proceedings.
مصطلحات موضوعية: Materials science, business.industry, Mask inspection, Substrate (printing), Image capture, law.invention, Optics, law, Phase-shift mask, Wafer, Photomask, Photolithography, business, Aerial image
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::e72f14c9ef071684e6c21813301dacbd
https://doi.org/10.1117/12.438407 -
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المؤلفون: Alex Goldenshtein, Yaron I. Gold
المصدر: SPIE Proceedings.
مصطلحات موضوعية: Computational complexity theory, business.industry, ComputingMethodologies_IMAGEPROCESSINGANDCOMPUTERVISION, Sharpening, Noise (electronics), Convolution, Optics, Computer Science::Computer Vision and Pattern Recognition, Cathode ray, Reversing, business, Image resolution, Beam (structure), Mathematics
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::d30539207d1d9dfc0f39f2c4209e133a
https://doi.org/10.1117/12.308774