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المؤلفون: Eswar Ramanathan, Zhiguo Sun, Vijaya Rana, Vijayalakshmi Seshachalam, Anbu Selvam Km Mahalingam, Chauhan Kripa Nidhan, Joseph F. Shepard, Tingge Xu, Minrui Wang, Mary Claire Silvestre, Yang Bum Lee
المصدر: 2019 China Semiconductor Technology International Conference (CSTIC).
مصطلحات موضوعية: Stress (mechanics), Back end of line, Outgassing, Materials science, Stack (abstract data type), business.industry, Optoelectronics, Wafer, Dielectric, business, Lithography, Layer (electronics)
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::de9b2ad9e98e3877a46e1262eb526a5c
https://doi.org/10.1109/cstic.2019.8755634 -
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المؤلفون: Ashwini Chandrashekar, Jinping Liu, Bharat Krishnan, M. Gribelyuk, A. Zainuddin, Kassim Joseph K, T. J. Tang, Zhiguo Sun, J. Yang, Eswar Ramanathan, Shishir Ray, Ritesh Ray Chaudhuri, Tian Shen, Jay Mody, Huang Liu, Anbu Selvam Km Mahalingam, Kong Boon Yeap, Linjun Cao, Rinus T. P. Lee, Ryan Sporer, D. Damjanovic, N. Petrov
المصدر: 2018 IEEE Symposium on VLSI Technology.
مصطلحات موضوعية: Interconnection, Materials science, business.industry, Annealing (metallurgy), Dielectric, Nanosecond, Laser, Capacitance, law.invention, Grain growth, law, Optoelectronics, Nanosecond laser, business
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::0dd407cc68abf63f0ac888a120bb66aa
https://doi.org/10.1109/vlsit.2018.8510651 -
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المؤلفون: Chun Hui Low, Anbu Selvam Km Mahalingam, Ming He, DeNeil Park, Alycia Roux, Yue Zhou, Mert Karakoy, Daniel Fisher, Mary Claire Silvestre, Craig Child
المصدر: 2017 28th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC).
مصطلحات موضوعية: Interconnection, Yield (engineering), Materials science, Real-time computing, Process (computing), 02 engineering and technology, 021001 nanoscience & nanotechnology, 01 natural sciences, Engineering physics, 010309 optics, 0103 physical sciences, Macro, 0210 nano-technology, Critical dimension
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::ce8c06de8656b2d11b892a74af58948c
https://doi.org/10.1109/asmc.2017.7969189 -
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المؤلفون: Shafaat Ahmed, Ketan Shah, Craig Child, Stephan Grunow, Dinesh Koli, Anbu Selvam Km Mahalingam, Adam da Silva, Tien-Jen Cheng, Mukta Sharma, Teng-Yin Lin
المصدر: 2017 28th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC).
مصطلحات موضوعية: Void (astronomy), Interconnection, Yield (engineering), Plating, Nucleation, Wafer, Composite material, Electroplating, Die (integrated circuit)
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::298867b129379d7d6b064f65fb42d6cc
https://doi.org/10.1109/asmc.2017.7969191 -
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المؤلفون: Mary Claire Silvestre, Eswar Ramanathan, Mukesh Gogna, Christopher Ordonio, Anbu Selvam Km Mahalingam, John Schaller
المصدر: 2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC).
مصطلحات موضوعية: Engineering drawing, Materials science, business.industry, Process (computing), Rework, 02 engineering and technology, engineering.material, 021001 nanoscience & nanotechnology, 01 natural sciences, 010309 optics, Back end of line, Coating, Resist, Stack (abstract data type), 0103 physical sciences, Trench, engineering, 0210 nano-technology, Process engineering, business, Lithography
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::760bbde5f34951f426c91d3e1b50157c
https://doi.org/10.1109/asmc.2016.7491093 -
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المؤلفون: Anbu Selvam Km Mahalingam, San Leong Liew, Prakash Periasamy, Craig Child, Jeric Sarad, Adam da Silva
المصدر: 2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC).
مصطلحات موضوعية: Interconnection, Materials science, business.industry, Annealing (metallurgy), Design of experiments, chemistry.chemical_element, Current ramp, Copper, Electromigration, chemistry, Technology scaling, Electronic engineering, Optoelectronics, Undercut, business
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::5993c83a5f8ba70ff08c0ddedd79d82b
https://doi.org/10.1109/asmc.2016.7491147 -
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المؤلفون: Anbu Selvam Km Mahalingam, Qian Ge, J.-B. Laloë, San Leong Liew, Mary Claire Silvestre, Alain Laval, Balajee Rajagopalan, Robert F. Teagle, Eswar Ramanathan, Nobuyuki Takahashi, Sohana Khanal
المصدر: 2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC).
مصطلحات موضوعية: Chamfer, Materials science, Sputtering, Process (computing), Deposition (phase transition), Wafer, Nanotechnology, Nitride, Sputter deposition, Engineering physics, Parametric statistics
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::3c171f5cc5531e1dd0b7472867e52055
https://doi.org/10.1109/asmc.2016.7491165 -
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المؤلفون: Aleksandra Clancy, Ayman Hamouda, Ashwini Chandrasekhar, Shyam Pal, Jeff Shu, Christopher Ordonio, Jason Eugene Stephens, Chun Hui Low, Ming He, Prakash Periasamy, Mary Claire Silvestre, Anbu Selvam Km Mahalingam, Peter Welti, Craig Child, Granger Lobb, Ketan Shah
المصدر: 2016 IEEE International Interconnect Technology Conference / Advanced Metallization Conference (IITC/AMC).
مصطلحات موضوعية: Standard cell, Interconnection, Atomic layer deposition, Materials science, Technology scaling, Process (computing), Nanotechnology, Dry etching, Engineering physics, Scaling
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::f7a2ece826e66bfdf116c6484b2c2ed5
https://doi.org/10.1109/iitc-amc.2016.7507642 -
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المؤلفون: Craig Child, Prakash Periasamy, Ashwini Chandrasekhar, Shyam Pal, Chun Hui Low, Anbu Selvam Km Mahalingam, Ketan Shah, Christopher Ordonio, Peter Welti
المصدر: 2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC).
مصطلحات موضوعية: Materials science, Yield (engineering), business.industry, Nanotechnology, 02 engineering and technology, 021001 nanoscience & nanotechnology, 01 natural sciences, 010309 optics, Atomic layer deposition, Resist, Chemical-mechanical planarization, 0103 physical sciences, Optoelectronics, 0210 nano-technology, business, Lithography, Critical dimension, Layer (electronics), Shrinkage
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::b2de681e559d4c68e72791f7ec32be1a
https://doi.org/10.1109/asmc.2016.7491157 -
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المؤلفون: Craig Child, A K M Sajjadul Islam, Prakash Periasamy, Ashwini Chandrasekhar, Anbu Selvam Km Mahalingam, Christian Witt
المصدر: 2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC).
مصطلحات موضوعية: Aqueous solution, Yield (engineering), Fabrication, business.industry, 020209 energy, Nanotechnology, 02 engineering and technology, Integrated circuit, law.invention, Surface tension, chemistry.chemical_compound, Hydrofluoric acid, Semiconductor, chemistry, law, 0202 electrical engineering, electronic engineering, information engineering, Optoelectronics, Node (circuits), business
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::032be74af838bb3ade53338a5a97caee
https://doi.org/10.1109/asmc.2016.7491168