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المؤلفون: Qais Saadeh, Philipp Naujok, Devesh Thakare, Meiyi Wu, Vicky Philipsen, Frank Scholze, Christian Buchholz, Zanyar Salami, Yasser Abdulhadi, Danilo Ocaña García, Heiko Mentzel, Anja Babuschkin, Christian Laubis, Victor Soltwisch
المصدر: Optik. 273:170455
مصطلحات موضوعية: Science & Technology, INFORMATION, Thin films, MIRRORS, Optics, Cobalt, X-ray reflectivity, FREQUENCY-ANALYSIS, Carbon, Atomic and Molecular Physics, and Optics, REFLECTOMETRY, Electronic, Optical and Magnetic Materials, Extreme ultraviolet, THIN-FILMS, Physical Sciences, Optical constants, SCATTERING, WAVELET-TRANSFORM, Electrical and Electronic Engineering, EXTREME-ULTRAVIOLET, OPTIMIZATION
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المؤلفون: Annett Barboutis, Ayhan Babalik, Jana Puls, Christian Stadelhoff, Anja Schönstedt, Jana Lehnert, Claudia Tagbo, Christian Laubis, Michael Sintschuk, Anja Babuschkin, Heiko Mentzel, Andreas Fischer, Frank Scholze, Christian Buchholz, Sina Jaroslawzew
المصدر: Extreme Ultraviolet (EUV) Lithography X.
مصطلحات موضوعية: Optics, Materials science, Beamline, business.industry, Extreme ultraviolet lithography, Detector, Radiant energy, Radiometry, business, Fluence, Metrology, Diode
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::37df636c64aaf4f39073c293cb67a02f
https://doi.org/10.1117/12.2514933