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1دورية أكاديمية
المصدر: Micro and Nano Engineering, Vol 20, Iss , Pp 100223- (2023)
مصطلحات موضوعية: EUV lithography, EUV photomasks, EUV absorbers, Bi-layer patterning, Rigorous imaging simulations, M3D, Electronics, TK7800-8360, Technology (General), T1-995
وصف الملف: electronic resource
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2دورية أكاديمية
المؤلفون: Rachel A. Nye, Kaat Van Dongen, Jean‐François deMarneffe, Gregory N. Parsons, Annelies Delabie
المصدر: Advanced Materials Interfaces, Vol 10, Iss 20, Pp n/a-n/a (2023)
مصطلحات موضوعية: area‐selective deposition, nanopatterns, supercycles, TiO2, uniformity, Physics, QC1-999, Technology
وصف الملف: electronic resource
Relation: https://doaj.org/toc/2196-7350
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3دورية أكاديمية
المؤلفون: Niels Claessens, Zamran Zahoor Khan, Negin Rahnemai Haghighi, Annelies Delabie, André Vantomme, Wilfried Vandervorst, Johan Meersschaut
المصدر: Scientific Reports, Vol 12, Iss 1, Pp 1-8 (2022)
وصف الملف: electronic resource
Relation: https://doaj.org/toc/2045-2322
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4دورية أكاديمية
المؤلفون: Meiyi Wu, Jean-François de Marneffe, Karl Opsomer, Christophe Detavernier, Annelies Delabie, Philipp Naujok, Özge Caner, Andy Goodyear, Mike Cooke, Qais Saadeh, Victor Soltwisch, Frank Scholze, Vicky Philipsen
المصدر: Micro and Nano Engineering, Vol 12, Iss , Pp 100089- (2021)
مصطلحات موضوعية: EUV lithography, EUV mask absorber, Alloy absorber for EUV mask, RuTa alloy, Material optical properties refractive index, Mask absorber etching, Electronics, TK7800-8360, Technology (General), T1-995
وصف الملف: electronic resource
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5
المؤلفون: Niels Claessens, Annelies Delabie, André Vantomme, Wilfried Vandervorst, Johan Meersschaut
المصدر: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. 540:174-181
مصطلحات موضوعية: Nuclear and High Energy Physics, Instrumentation
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6
المؤلفون: Rachel A. Nye, Kaat Van Dongen, Danilo De Simone, Hironori Oka, Gregory N. Parsons, Annelies Delabie
المصدر: Chemistry of Materials. 35:2016-2026
مصطلحات موضوعية: General Chemical Engineering, Materials Chemistry, General Chemistry
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7
المؤلفون: Yukio Kaneda, Rachel A. Nye, Esteban A. Marques, Silvia Armini, Annelies Delabie, Michiel J. van Setten, Geoffrey Pourtois
المصدر: The Journal of Physical Chemistry C.
مصطلحات موضوعية: General Energy, Physical and Theoretical Chemistry, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials
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8
المؤلفون: Devesh Thakare, Annelies Delabie, Vicky Philipsen
المصدر: 37th European Mask and Lithography Conference.
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::e1d42f8910af423fcd2e4eab781f5d57
https://doi.org/10.1117/12.2640098 -
9
المصدر: Journal of Vacuum Science & Technology A. 41:032406
مصطلحات موضوعية: Surfaces and Interfaces, Condensed Matter Physics, Surfaces, Coatings and Films
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10
المؤلفون: Rachel Nye, Kaat Van Dongen, Hironori Oka, Hajime Furutani, Gregory Parsons, Danilo De Simone, Annelies Delabie
المساهمون: Sanders, DP, Guerrero, D
المصدر: Advances in Patterning Materials and Processes XXXIX.
مصطلحات موضوعية: Technology, Science & Technology, Materials Science, Materials Science, Multidisciplinary, Optics, Photoresist, Polymethacrylate, Area-selective deposition, ALD, EUV lithography, Physical Sciences, TiO2, Imaging Science & Photographic Technology, ATOMIC LAYER DEPOSITION
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::b0fd196a6f7d8b9c10dc509e0613fdc7
https://doi.org/10.1117/12.2613815