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1دورية أكاديمية
المؤلفون: Xiaoyu Guo, Wenhao Liu, Jonathan Schwartz, Suk Hyun Sung, Dechen Zhang, Makoto Shimizu, Aswin L. N. Kondusamy, Lu Li, Kai Sun, Hui Deng, Harald O. Jeschke, Igor I. Mazin, Robert Hovden, Bing Lv, Liuyan Zhao
المصدر: Nature Communications, Vol 15, Iss 1, Pp 1-10 (2024)
مصطلحات موضوعية: Science
وصف الملف: electronic resource
Relation: https://doaj.org/toc/2041-1723
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2دورية أكاديمية
المؤلفون: Yong Chan Jung, Su Min Hwang, Dan N. Le, Aswin L. N. Kondusamy, Jaidah Mohan, Sang Woo Kim, Jin Hyun Kim, Antonio T. Lucero, Arul Ravichandran, Harrison Sejoon Kim, Si Joon Kim, Rino Choi, Jinho Ahn, Daniel Alvarez, Jeff Spiegelman, Jiyoung Kim
المصدر: Materials, Vol 13, Iss 15, p 3387 (2020)
مصطلحات موضوعية: atomic layer deposition (ALD), aluminum nitride, hydrazine, trimethyl aluminum (TMA), Technology, Electrical engineering. Electronics. Nuclear engineering, TK1-9971, Engineering (General). Civil engineering (General), TA1-2040, Microscopy, QH201-278.5, Descriptive and experimental mechanics, QC120-168.85
وصف الملف: electronic resource
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المؤلفون: Su Min Hwang, Jean François Veyan, Kui Tan, Jeff Spiegelman, Jiyoung Kim, Harrison Sejoon Kim, Luis Fabián Peña, Aswin L. N. Kondusamy, Yong Chan Jung, Daniel Alvarez, Zhiyang Qin
المصدر: ECS Transactions. 92:265-271
مصطلحات موضوعية: Materials science, Chemical engineering, Vapor phase, Anhydrous, Electroplating, Surface cleaning
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المؤلفون: Byung Keun Hwang, Zhiyang Qin, Xiaobing Zhou, Telgenhoff Michael D, Xin Meng, Jiyoung Kim, Su Min Hwang, Harrison Sejoon Kim, Jeanette Young, Aswin L. N. Kondusamy
المصدر: ECS Transactions. 89:63-69
مصطلحات موضوعية: Materials science, Analytical chemistry, Plasma, Cathode, Process conditions, law.invention, Atomic layer deposition, chemistry.chemical_compound, X-ray photoelectron spectroscopy, Silicon nitride, chemistry, law, Thin film, Fourier transform infrared spectroscopy
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المؤلفون: Byung Keun Hwang, Gary Goodman, Lanxia Cheng, Harrison Sejoon Kim, Aswin L. N. Kondusamy, Xin Meng, Antonio T. Lucero, Si Joon Kim, Jiyoung Kim, Alan S. Wan, Su Min Hwang, Young-Chul Byun, Telgenhoff Michael D, Joy S. Lee, Robert M. Wallace
المصدر: ACS Applied Materials & Interfaces. 10:44825-44833
مصطلحات موضوعية: 010302 applied physics, Materials science, business.industry, Hexachlorodisilane, Analytical chemistry, 02 engineering and technology, Plasma, 021001 nanoscience & nanotechnology, 01 natural sciences, Cathode, law.invention, chemistry.chemical_compound, Atomic layer deposition, Semiconductor, chemistry, Silicon nitride, Impurity, law, 0103 physical sciences, General Materials Science, 0210 nano-technology, business, Layer (electronics)
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المؤلفون: Daniel Alvarez, Jeffrey J. Spiegelman, Aswin L. N. Kondusamy, Jiyoung Kim, Keisuke Andachi
المصدر: 2019 Compound Semiconductor Week (CSW).
مصطلحات موضوعية: Materials science, business.industry, Hydrazine, chemistry.chemical_element, Dielectric, Nitride, Piezoelectricity, Atomic diffusion, chemistry.chemical_compound, Semiconductor, Thermal conductivity, chemistry, Aluminium, Composite material, business
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::61a134287802d6dc677d8b450292320a
https://doi.org/10.1109/iciprm.2019.8819346 -
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المؤلفون: Su Min Hwang, Aswin L. N. Kondusamy, Qin Zhiyang, Harrison S. Kim, Jiyoung Kim, Byung Keun Hwang, Xiaobing Zhou, Michael Telgenhoff, Jeanette Young
المصدر: ECS Meeting Abstracts. :1188-1188