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1مؤتمر
المؤلفون: Sadjadi, Reza, Zhu, Helen, Cirigliano, Peter, Pavel, Elizabeth, Athayde, Amulya, Bozdog, Cornel, Sendler, Michael, Mor, Danny
المصدر: 2007 International Symposium on Semiconductor Manufacturing Semiconductor Manufacturing, 2007. ISSM 2007. International Symposium on. :1-3 Oct, 2007
Relation: 2007 International Symposium on Semiconductor Manufacturing
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2دوريةA Hybrid Dry-Wet Approach for Removal of a Dummy Polysilicon Gate in a Replacement Metal Gate Scheme
المؤلفون: Hwang, Guang Yaw, Liao, J.H., Tzou, S.F., Lin, Mark, Yeh, Autumn, Lou, David, Chen, Eason, Huang, Weien, Kamarthy, Gowri, Xu, Kai Dong, Athayde, Amulya
المصدر: Diffusion and Defect Data Part B: Solid State Phenomena; April 2012, Vol. 187 Issue: 1 p57-60, 4p
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3دورية أكاديمية
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