المؤلفون: Chia-Ying Yang, Yu‐Tsun Cheng, Gao-Yu Hsiung, Che-Kai Chan, Yi-Ching Ou, Bei-Jing Chan, June-Rong Chen

المصدر: Vacuum. 84:747-750

مصطلحات موضوعية: Chemistry, Environmental humidity, Nuclear engineering, chemistry.chemical_element, Condensed Matter Physics, Nitrogen, Surfaces, Coatings and Films, Outgassing, Air shower, Glovebox, Environmental chemistry, Thermal, Turbomolecular pump, Instrumentation, Water vapor

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::4830a256a7ddb2f8ab6001a29c0d0099
https://doi.org/10.1016/j.vacuum.2009.03.038