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المؤلفون: Jan-Uwe Schmidt, Martin Friedrichs, Dirk Rudloff, Benjamin Voelker, Thor Bakke, Hubert Lakner
المصدر: SPIE Proceedings.
مصطلحات موضوعية: Microelectromechanical systems, Materials science, Spatial light modulator, Fabrication, Optics, CMOS, Wafer bonding, business.industry, Adaptive optics, Actuator, business, Lithography
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::4c36d7e4b964a97e7fc1b360c3df52c3
https://doi.org/10.1117/12.787015 -
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المؤلفون: Harald Schenk, Benjamin Voelker, Martin Friedrichs, Thor Bakke, Hubert Lakner, Lars Leonardsson, Manfred Reiche
المصدر: SPIE Proceedings.
مصطلحات موضوعية: Monocrystalline silicon, Microelectromechanical systems, Materials science, Optics, Adhesive bonding, business.industry, Anodic bonding, Wafer bonding, Optoelectronics, Silicon on insulator, Wafer, Direct bonding, business
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::d537dd5e4e8a59be9f58059d331d55f5
https://doi.org/10.1117/12.590567