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1
المؤلفون: Thibaut Bourguignon, Bertrand Le Gratiet, Jonathan Pradelles, Sébastien Bérard-Bergery, Charles Valade, Nivea G. Schuch, Nicolas Possémé
المصدر: Metrology, Inspection, and Process Control XXXVII.
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::1f91126c80f0f7f161537dea4c560a45
https://doi.org/10.1117/12.2657914 -
2
المؤلفون: Bertrand Le-Gratiet, Serap A. Savari
المصدر: Journal of Micro/Nanopatterning, Materials, and Metrology. 21
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::c548bfcbc3906830a8d78c570b8fc742
https://doi.org/10.1117/1.jmm.21.4.041601 -
3
المؤلفون: Thibaut Bourguignon, Bertrand Le-Gratiet, Jonathan Pradelles, Sébastien Bérard-Bergerie, Guido Rademaker, Nicolas Possémé
المصدر: 37th European Mask and Lithography Conference.
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::de312581d77b5cd7caf0824af4cb781f
https://doi.org/10.1117/12.2640140 -
4
المؤلفون: Elvire Soltani, Bertrand Le-Gratiet, Sébastien Bérard-Bergery, Jonathan Pradelles, Simon Desmoulins, Emmanuel Sicurani, Raluca Tiron
المصدر: 37th European Mask and Lithography Conference.
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::615e1b49513bbd58a942386c7012aff9
https://doi.org/10.1117/12.2640712 -
5
المؤلفون: Bertrand Le Gratiet, Delphine Le Cunff, Laurent Bidault, Thomas Alcaire, Sébastien Desmaison, Régis Bouyssou
المصدر: Journal of Micro/Nanopatterning, Materials, and Metrology. 21
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::6cd09309154bf6c6ce121c30d9b19bfc
https://doi.org/10.1117/1.jmm.21.4.041603 -
6
المؤلفون: Bertrand Le-Gratiet, Régis Bouyssou, Julien Ducoté, Florent Dettoni, Thibaut Bourguignon, Vincent Morin, Romain Bange, Nivea G. Schuch, Julien Nicoulaud, Guillaume Renault, Frederic Robert, Thiago Figueiro
المصدر: Metrology, Inspection, and Process Control XXXVI.
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::6e771354a876eb3a8ff8efccf91f65df
https://doi.org/10.1117/12.2615199 -
7
المؤلفون: Elvire Soltani, Bertrand Le-Gratiet, Sébastien Bérard-Bergery, Jonathan Pradelles, Romain Bange, Nivea G. Schuch, Thiago Figueiro, Raluca Tiron
المصدر: Metrology, Inspection, and Process Control XXXVI.
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::773977953bbbf6cb4cba1dc48a893ac3
https://doi.org/10.1117/12.2613322 -
8
المؤلفون: Thibaut Bourguignon, Regis Bouyssou, Jonathan Pradelles, Sébastien Bérard-Bergery, Bertrand Le-Gratiet, Romain Bange, Nivea G. Schuch, Thiago Figueiro, Nicolas Possémé
المصدر: Metrology, Inspection, and Process Control XXXVI.
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::0588a3a055310cb941841a5d7dca41a7
https://doi.org/10.1117/12.2613327 -
9
المؤلفون: Valentina Dall'Asta, Emma Litterio, Nicoletta Corneo, Bertrand Le-Gratiet, Tito F. Bellunato
المصدر: Advances in Patterning Materials and Processes XXXIX.
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::acaa772467db1c1d0992e19f9c41d994
https://doi.org/10.1117/12.2614005 -
10
المؤلفون: Leon van Dijk, Kedir M. Adal, Sepideh Golmakaniyoon, Bertrand Le-Gratiet, Niyam Haque, Reza Sahraeian, Auguste Lam, Richard van Haren
المصدر: 2022 33rd Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC).
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::9b20fe7ea6759455d9bec7257ef789b7
https://doi.org/10.1109/asmc54647.2022.9792531