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1
المؤلفون: Scott Jessen, James Walter Blatchford, Steven L. Prins, Ki-Ho Baik, Linyong Pang, Bob Gleason, Thuc Dam
المصدر: ECS Transactions. 27:449-454
مصطلحات موضوعية: Set (abstract data type), Scheme (programming language), Computer science, Hardware_INTEGRATEDCIRCUITS, Wafer, Node (circuits), Function (mathematics), Topology, computer, Scaling, computer.programming_language
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2
المؤلفون: Thuc Dam, Tom Cecil, Dongxue Chen, Linyong Pang, Peter Hu, Bob Gleason, Ki-Ho Baik, Danping Peng, Vikram Tolani, Lin He, Guangming Xiao
المصدر: ECS Transactions. 27:433-442
مصطلحات موضوعية: Engineering drawing, Engineering, Level set method, Computer engineering, business.industry, Computational lithography, Hardware_INTEGRATEDCIRCUITS, Key (cryptography), Inverse, Mask inspection, Node (circuits), business, Lithography
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3
المؤلفون: Bob Gleason, Tom Cecil, Ki-Ho Baik, Linyong Pang, Guangming Xiao, Thuc Dam, Peter Hu, Vikram Tolani
المصدر: ECS Transactions. 18:299-314
مصطلحات موضوعية: Engineering, Level set method, Flow (mathematics), business.industry, Process (computing), Node (circuits), Function (mathematics), business, Lithography, Algorithm, AND gate, Aerial image, Computer hardware
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4
المؤلفون: Linyong Pang, Dongxue Chen, Danping Peng, Ying Li, Vikram Tolani, Masaki Satake, Peter Hu, Bob Gleason
المصدر: SPIE Proceedings.
مصطلحات موضوعية: Materials science, Optics, Pixel, business.industry, Extreme ultraviolet lithography, Extreme ultraviolet, Process (computing), Degrees of freedom (mechanics), business, Blank, Lithography, Compensation (engineering)
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::4d9c248cb3d613f49970a1ec98fe5c16
https://doi.org/10.1117/12.977174 -
5
المؤلفون: Dongxue Chen, Tingyang Liu, Masaki Satake, Linyong Pang, Bob Gleason, Peter Hu, Danping Peng, Vikram Tolani, Anthony Vacca
المصدر: SPIE Proceedings.
مصطلحات موضوعية: Engineering, Scanner, Bridging (networking), business.industry, Computational lithography, Mask inspection, Metrology, law.invention, law, Hardware_INTEGRATEDCIRCUITS, Computer vision, Node (circuits), Artificial intelligence, Photolithography, business, Lithography, Computer hardware
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::1925569951a6a5abf4b1bebef8773236
https://doi.org/10.1117/12.977176 -
6
المؤلفون: Paul Rissman, Robert Sinn, Thuc Dam, Bob Gleason
المصدر: SPIE Proceedings.
مصطلحات موضوعية: Set (abstract data type), Engineering, Computational lithography, business.industry, Perspective (graphical), Hardware_INTEGRATEDCIRCUITS, Electronic engineering, Multiple patterning, Segmentation, Layer (object-oriented design), business, Lithography, Domain (software engineering)
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::d15d6c9f7313a3beb1ee8d36b25fe4e0
https://doi.org/10.1117/12.896963 -
7
المؤلفون: Suk-Joo Lee, Se-Jin Park, Bob Gleason, Te-Hung Wu, Jong-Doo Kim, Robert Sinn, Ji Young Hong
المصدر: SPIE Proceedings.
مصطلحات موضوعية: Depth of focus, Computer science, Maximum depth, Real-time computing, Process (computing), Node (circuits), Static random-access memory, Focus (optics), Algorithm
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::6b6f9f4a15859f3e868dff745420bc77
https://doi.org/10.1117/12.896503 -
8
المؤلفون: Tom Cecil, Hyong-Euk Lee, M. J. Hong, Bob Gleason, Xin Zhou, Donghwan Son, David Irby, Guangming Xiao, Sooryong Lee, Sunhwa Jung, Sungsoo Suh, Woojoo Sim, Chris Ashton, David Kim, Lan Luan
المصدر: SPIE Proceedings.
مصطلحات موضوعية: Computer engineering, Computer science, Semiconductor device fabrication, Hardware_INTEGRATEDCIRCUITS, Process (computing), Process window, Node (circuits), Degrees of freedom (mechanics), Lithography, Simulation, Design for manufacturability
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::e65b496aa63ee52f8b0f184fc34864c2
https://doi.org/10.1117/12.882814 -
9
المؤلفون: Tom Cecil, Linyong Pang, Ki-Ho Baik, Bob Gleason, Peter Hu, Thuc Dam, Vikram Tolani, Danping Peng, Guangming Xiao, Dongxue Chen, Lin He
المصدر: SPIE Proceedings.
مصطلحات موضوعية: business.industry, Computational lithography, Computer science, Optical physics, Chip, law.invention, Optics, law, Hardware_INTEGRATEDCIRCUITS, Electronic engineering, Node (circuits), Photolithography, business, Lithography
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::3fb0d723450aeaf85118de1ae2fbf263
https://doi.org/10.1117/12.848145 -
10
المؤلفون: Thuc Dam, Jacek K. Tyminski, Vikram Tolani, Bob Gleason, Steven D. Slonaker, Ki-Ho Baik, Peter Hu, Linyong Pang
المصدر: SPIE Proceedings.
مصطلحات موضوعية: business.industry, Computational lithography, Computer science, Process (computing), law.invention, Optics, Resist, law, Hardware_INTEGRATEDCIRCUITS, Electronic engineering, Photolithography, business, Lithography, Optical aberration
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::125b522c583c40f7d95133093e00104c
https://doi.org/10.1117/12.848257