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1دورية أكاديمية
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المؤلفون: A. Vandooren, Francois Leverd, F. Pionnier, Sorin Cristoloveanu, Vincent Fiori, Roland Pantel, M. Broekaart, G. Imbert, Stephane Denorme, L. Gabette, Thomas Skotnicki, C. Chaton, Frederic Boeuf, F. Vigilant, S. Jullian, T. Kormann, C. Gallon, Claire Fenouillet-Beranger, Pascal Gouraud, C. Laviron, H. Bernard, Nicolas Loubet, Philippe Garnier, A. Tarnowka
المساهمون: Laboratoire des technologies de la microélectronique (LTM), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Université Joseph Fourier - Grenoble 1 (UJF)-Centre National de la Recherche Scientifique (CNRS), Université Joseph Fourier - Grenoble 1 (UJF)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Centre National de la Recherche Scientifique (CNRS), Clot, Marielle
المصدر: Japanese Journal of Applied Physics
Japanese Journal of Applied Physics, Japan Society of Applied Physics, 2006, pp.Part1-45 Issue: 4B (2006) 3058-3063
Japanese Journal of Applied Physics, 2006, pp.Part1-45 Issue: 4B (2006) 3058-3063مصطلحات موضوعية: Materials science, Physics and Astronomy (miscellaneous), Silicon, General Physics and Astronomy, chemistry.chemical_element, Silicon on insulator, 02 engineering and technology, 01 natural sciences, law.invention, PMOS logic, Stress (mechanics), law, 0103 physical sciences, Ultimate tensile strength, ComputingMilieux_MISCELLANEOUS, NMOS logic, 010302 applied physics, business.industry, Transistor, General Engineering, 021001 nanoscience & nanotechnology, chemistry, Optoelectronics, Field-effect transistor, 0210 nano-technology, business
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المؤلفون: E. Sabouret, C. Verove, C. Chaton, Kathy Barla, B. Descouts, J. P. Reynard, J. Michailos, P. Motte
المصدر: Microelectronic Engineering. 60:113-118
مصطلحات موضوعية: Materials science, Silicon, business.industry, Doping, Copper interconnect, chemistry.chemical_element, Integrated circuit, Dielectric, Condensed Matter Physics, Copper, Atomic and Molecular Physics, and Optics, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, law.invention, chemistry, law, Optoelectronics, Electrical and Electronic Engineering, business, Silicon oxide, Layer (electronics)
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المؤلفون: Francois Leverd, Y. Dodo, G. Druais, Perceval Coudrain, N. Guitard, L.L. Chapelon, A. Ostrovsky, O. Robin, E. Cirot, V. Caubet, J. Pruvost, K. Haxaire, Alexis Farcy, N. Hotellier, D. Riquet, T. Divel, Christophe Aumont, Jean Michailos, Sébastien Petitdidier, R. Liou, N. Sillon, C. Chaton, E. Saugier, Jean-Philippe Colonna, S. Cordova, Pascal Ancey, S. Cheramy
المصدر: 3DIC
مصطلحات موضوعية: Engineering, business.industry, Embedded system, Final product, Wireless, Integrated circuit packaging, Integrated circuit design, business, Partition (database), Manufacturing engineering
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::6fc10f3c978f1ad767396df021eae78e
https://doi.org/10.1109/3dic.2012.6262962 -
5دورية أكاديمية
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المؤلفون: C. Chaton, Emmanuel Josse, R. Ranica, Emmanuelle Serret, Alexandre Villaret, Kathy Barla, A. Colin, M. Bidaud, H. Bono, Thierry Devoivre, Florian Cacho, B. Dumont, Michel Haond, R. Binger, C. Gallon, Remi Beneyton, Pierre Morin, R. Bianchini
المصدر: 2009 Proceedings of the European Solid State Device Research Conference.
مصطلحات موضوعية: Materials science, CMOS, law, Low-power electronics, MOSFET, Dispersion (optics), Electronic engineering, Electronic packaging, Wafer, Laser, Temperature measurement, law.invention
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::aec8dc4309401cd8d993b025b37e4bb0
https://doi.org/10.1109/essderc.2009.5331536 -
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المؤلفون: C. Chaton, M. Bidaud, R. Ranica, B. Dumont, Pierre Morin, G. Ribes, V. Huard, L. Proencamota, H. Bono
المصدر: 2007 15th International Conference on Advanced Thermal Processing of Semiconductors.
مصطلحات موضوعية: Materials science, business.industry, Transistor, Analytical chemistry, PMOS logic, law.invention, CMOS, law, Gate oxide, MOSFET, Optoelectronics, Wafer, Process window, business, NMOS logic
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::de975d2deb34ec6ecfd09aedf7672528
https://doi.org/10.1109/rtp.2007.4383850 -
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المؤلفون: N. Cabuil, A. Le Gouil, B. Dickson, A. Lagha, M. Aminpur, C. Chaton, J.-C. Royer, O. Doclot, David G. Seiler, Alain C. Diebold, Robert McDonald, C. Michael Garner, Dan Herr, Rajinder P. Khosla, Erik M. Secula
المصدر: AIP Conference Proceedings.
مصطلحات موضوعية: Amorphous silicon, Fabrication, Materials science, Silicon, business.industry, Analytical chemistry, chemistry.chemical_element, chemistry.chemical_compound, chemistry, X-ray photoelectron spectroscopy, Amorphous carbon, Gate oxide, Optoelectronics, Wafer, Thin film, business
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المؤلفون: F. Ferrieu, C. Chaton, D. Neira, C. Beitia, L. Proenca Mota, A. M. Papon, A. Tarnowka, David G. Seiler, Alain C. Diebold, Robert McDonald, C. Michael Garner, Dan Herr, Rajinder P. Khosla, Erik M. Secula
المصدر: AIP Conference Proceedings.
مصطلحات موضوعية: Materials science, Carbon film, Amorphous carbon, business.industry, Plasma-enhanced chemical vapor deposition, Ellipsometry, Analytical chemistry, Optoelectronics, Chemical vapor deposition, Combustion chemical vapor deposition, Thin film, business, Amorphous solid
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المؤلفون: C., Gallon, C., Fenouillet-Beranger, S., Denorme, F., Boeuf, V., Fiori, N., Loubet, T., Kormann, M., Broekaart, P., Gouraud, F., Leverd, G., Imbert, C., Chaton, C., Laviron, L., Gabette, F., Vigilanti, P., Garnier, H., Bernard, A., Tarnowka, A., Vandooren, R., Pantel, F., Pionnier, S., Jullian, S., Cr, Skotnicki, T.
المساهمون: STMicroelectronics, Institut de Microélectronique, Electromagnétisme et Photonique - Laboratoire d'Hyperfréquences et Caractérisation (IMEP-LAHC), Université Joseph Fourier - Grenoble 1 (UJF)-Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP )-Institut National Polytechnique de Grenoble (INPG)-Université Savoie Mont Blanc (USMB [Université de Savoie] [Université de Chambéry])-Centre National de la Recherche Scientifique (CNRS), Commissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information (CEA-LETI), Direction de Recherche Technologique (CEA) (DRT (CEA)), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA), Freescale Semiconducteurs, Philips France Semiconducteurs, Institut de Microélectronique, Electromagnétisme et Photonique (IMEP), Université Joseph Fourier - Grenoble 1 (UJF)-Institut National Polytechnique de Grenoble (INPG)-Centre National de la Recherche Scientifique (CNRS), Centre National de la Recherche Scientifique (CNRS)-Institut National Polytechnique de Grenoble (INPG)-Université Joseph Fourier - Grenoble 1 (UJF), Domenget, Chahla
المصدر: Japanese Journal of Applied Physics
Japanese Journal of Applied Physics, 2006, 45 (45), pp.3058-3063. ⟨10.1143/JJAP.45.3058⟩
Japanese Journal of Applied Physics, Japan Society of Applied Physics, 2006, 45, n± 4B, pp.3058-3063مصطلحات موضوعية: [SPI.NANO] Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics, ComputingMilieux_MISCELLANEOUS
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