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المؤلفون: Carol Boye, DukKyun Moon, Steven McDermott, Norbert Arnold, Nicole Saulnier, Felix Levitov, Sam Choi, Alex Goldenshtein, Uri Smolyan, Noam Amit, Injo Ok, Iqbal Saraf
المصدر: 2022 33rd Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC).
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::52bc90878a883049cac5651f227b2459
https://doi.org/10.1109/asmc54647.2022.9792525 -
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المؤلفون: A. Gaul, Andrew M. Greene, T. Levin, Dallas Lea, Victor Chan, Samuel S. Choi, Carol Boye, S. Mattam, J. S. Strane, Sean Teehan, Dechao Guo, Gauri Karve, Marc A. Bergendahl, Brad Austin, Kangguo Cheng
المصدر: IEEE Transactions on Semiconductor Manufacturing. 32:393-399
مصطلحات موضوعية: 0209 industrial biotechnology, Yield (engineering), Computer science, Hardware_PERFORMANCEANDRELIABILITY, 02 engineering and technology, Ring oscillator, Condensed Matter Physics, Fault (power engineering), Industrial and Manufacturing Engineering, Electronic, Optical and Magnetic Materials, 020901 industrial engineering & automation, CMOS, Logic gate, Hardware_INTEGRATEDCIRCUITS, Electronic engineering, Field-effect transistor, Isolation (database systems), Electrical and Electronic Engineering, Hardware_LOGICDESIGN, Electronic circuit
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المؤلفون: Fee Li Lie, Wei-Tsu Tseng, Claire Silvestre, Chen Jim C, Donald F. Canaperi, Carol Boye
المصدر: 2021 32nd Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC).
مصطلحات موضوعية: 010302 applied physics, Materials science, Consumables, business.industry, 02 engineering and technology, Blanket, 021001 nanoscience & nanotechnology, 01 natural sciences, Conditioning process, Surface cleaning, Reduction (complexity), 0103 physical sciences, Wafer, Defect size, 0210 nano-technology, Process engineering, business
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::dec210092f25af7db5772e2f29f84f55
https://doi.org/10.1109/asmc51741.2021.9435652 -
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المؤلفون: Sanjay Mehta, Scott DeVries, Carol Boye, Wei-Tsu Tseng, Chen Jim C, Mary-Claire Silvestre, Thamarai S. Devarajan, Fee Li Lie, Massud A. Aminpur
المصدر: 2020 31st Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC).
مصطلحات موضوعية: 0209 industrial biotechnology, 020901 industrial engineering & automation, Computer science, 02 engineering and technology, GeneralLiterature_MISCELLANEOUS, Reliability engineering
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::c3ab67580a5a169b0d541b34e2414f61
https://doi.org/10.1109/asmc49169.2020.9185337 -
5Transmission Electron Microscopy Sample Preparation By Design Based Recipe Writing in a DBFIB Part 2
المؤلفون: Marc A. Bergendahl, M. Biedrzycki, J. Hager, K. Nguyen, M. Persala, J. Arjavac, Brad Austin, Carol Boye, S. Shaar, Mary Breton, Michael Rizzolo, John G. Gaudiello, Sean Teehan, Shravan Matham, B. Cilingiroglu, James J. Demarest
المصدر: International Symposium for Testing and Failure Analysis.
مصطلحات موضوعية: Materials science, business.industry, Transmission electron microscopy, Recipe, Optoelectronics, Sample preparation, business
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::4ca71e6c1294b3cd26decf2043970581
https://doi.org/10.31399/asm.cp.istfa2019p0470 -
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المؤلفون: Marc A. Bergendahl, Carol Boye, Jay W. Strane, Gauri Karve, Dechao Guo, T. Levin, S. Mattam, Dallas Lea, Kangguo Cheng, S. Choi, A. Gaul, Sean Teehan, Andrew M. Greene, Brad Austin, Victor S. Chan
المصدر: 2019 30th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC).
مصطلحات موضوعية: 0209 industrial biotechnology, 020901 industrial engineering & automation, Yield (engineering), CMOS, Computer science, Phase (waves), Electronic engineering, Hardware_PERFORMANCEANDRELIABILITY, 02 engineering and technology, Ring oscillator, Isolation (database systems), Fault (power engineering)
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::2e81b5a0ec8f716f3126929b2bad3fd7
https://doi.org/10.1109/asmc.2019.8791793 -
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المؤلفون: Rajesh Ghaskadvi, Seth L. Knupp, Carol Boye
المصدر: IEEE Transactions on Semiconductor Manufacturing. 26:482-487
مصطلحات موضوعية: Process quality, Materials science, business.industry, Optoelectronics, Nanotechnology, Electrical and Electronic Engineering, Condensed Matter Physics, business, Lithography, Industrial and Manufacturing Engineering, Electronic, Optical and Magnetic Materials
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المؤلفون: Sumanth Kini, Andrew Stamper, Charu Tejwani, Sang Y. Chong, Carol Boye, Ralf Buengener, Roland Hahn, Bryan N. Rhoads, Sean D. Burns, Kourosh Nafisi, Colin J. Brodsky, S. Fan
المصدر: IEEE Transactions on Semiconductor Manufacturing. 24:165-172
مصطلحات موضوعية: Engineering drawing, Engineering, business.industry, Condensed Matter Physics, Industrial and Manufacturing Engineering, Finite element method, Die (integrated circuit), Electronic, Optical and Magnetic Materials, law.invention, Resist, law, Electronic engineering, Process window, Electrical and Electronic Engineering, Photolithography, Focus (optics), business, Lithography, Critical dimension
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المؤلفون: Jeffrey C. Shearer, Philip J. Oldiges, Soon-Cheon Seo, Terry A. Spooner, Matthew E. Colburn, Ravikumar Ramachandran, V. Sardesai, Kang-ill Seo, Dinesh Gupta, Richard G. Southwick, Xiao Sun, S. Stieg, H. Cai, S. Kanakasabaphthy, Vamsi Paruchuri, R. Sampson, Lars W. Liebmann, Walter Kleemeier, Kisik Choi, Deok-Hyung Lee, Christopher Prindle, R. Divakaruni, H. Shang, Abhijeet Paul, T. Gow, D. McHerron, Dechao Guo, Fee Li Lie, J. Nam, Neeraj Tripathi, Ruilong Xie, R. Kambhampati, Muthumanickam Sankarapandian, Balasubramanian S. Pranatharthi Haran, Carol Boye, James H. Stathis, B. Hamieh, John Iacoponi, Christopher J. Waskiewicz, Geum-Jong Bae, Derrick Liu, Sanjay Mehta, Reinaldo A. Vega, Terence B. Hook, Min Gyu Sung, Jay W. Strane, D.I. Bae, Robin Chao, Hoon Kim, F. Nelson, Theodorus E. Standaert, L. Jang, Erin Mclellan, M. Celik, S. Nam, Tae-Chan Kim, C.-C. Yeh, Sean D. Burns, P. Montanini, Charan V. V. S. Surisetty, Raghavasimhan Sreenivasan, Ju-Hwan Jung, B. Lherron, S.-B. Ko, E. Alptekin, Huiming Bu, Injo Ok, Jin Cho, Mukesh Khare, J. G. Hong, Gen Tsutsui, Andreas Scholze, Bomsoo Kim, D. Chanemougame, M. Mottura, M. Weybright, H. Mallela, K. Kim, Hemanth Jagannathan, Chanro Park, J. Jenq, Donald F. Canaperi, Young-Kwan Park, R. Jung, Kangguo Cheng
المصدر: 2014 Symposium on VLSI Technology (VLSI-Technology): Digest of Technical Papers.
مصطلحات موضوعية: Materials science, Dopant, business.industry, Limit (music), Gate stack, Electrical engineering, Silicon on insulator, Optoelectronics, Static random-access memory, business, Lithography, Communication channel, Power (physics)
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::d4d82166b734af3db83f196d83853ba5
https://doi.org/10.1109/vlsit.2014.6894342 -
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المؤلفون: Scott Halle, Marcy Beard, Chiew-seng Koay, Oscar van der Straten, T. Levin, Lars Liemann, Juntao Li, D. Horak, Bryan Morris, Terry A. Spooner, S. Choi, Carol Boye, Donald F. Canaperi, Sylvie Mignot, Muthumanickam Sankarapandian, Elbert E. Huang, Chiahsun Tseng, James Hsueh-Chung Chen, Erin Mclellan, James J. Kelly, S. Fan, James J. Demarest, Nicole Saulnier, Hosadurga Shobha, Matthew E. Colburn, Balasubramanian S. Haran, Yongan Xu, Yunpeng Yin, Larry Clevenger, Christopher J. Waskiewicz, Mignot Yann, John C. Arnold
المصدر: 2012 IEEE International Interconnect Technology Conference.
مصطلحات موضوعية: Interconnection, Materials science, business.industry, Copper interconnect, chemistry.chemical_element, Copper, Line (electrical engineering), chemistry, Logic gate, Electronic engineering, Optoelectronics, business, Layer (electronics), Lithography
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::f371baddebc7d64eac10bf2c213e8ee5
https://doi.org/10.1109/iitc.2012.6251637