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المؤلفون: Peter Zandbergen, D. Van Steenwinckel, Jeroen Herman Lammers, H Kwinten, Casper A. H. Juffermans
المصدر: IEEE Transactions on Semiconductor Manufacturing. 18:37-41
مصطلحات موضوعية: Materials science, Nanolithography, law, Electronic engineering, Process (computing), Nanotechnology, Electrical and Electronic Engineering, Photolithography, Condensed Matter Physics, Industrial and Manufacturing Engineering, Electronic, Optical and Magnetic Materials, law.invention
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المؤلفون: Peter Dirksen, Augustus J. E. M. Janssen, Casper A. H. Juffermans, Ad Leeuwestein, Joseph J. M. Braat
المساهمون: Control Systems
المصدر: Proceedings Optical Microlithography XVI, 25-28 February 2003, Santa Clara, California, 1-10
STARTPAGE=1;ENDPAGE=10;TITLE=Proceedings Optical Microlithography XVI, 25-28 February 2003, Santa Clara, Californiaمصطلحات موضوعية: Point spread function, Materials science, business.industry, ComputingMethodologies_IMAGEPROCESSINGANDCOMPUTERVISION, Coma (optics), ComputerApplications_COMPUTERSINOTHERSYSTEMS, Astigmatism, medicine.disease, law.invention, Lens (optics), Spherical aberration, Optics, law, medicine, Wafer, Pinhole (optics), Photolithography, business
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::f2552cc662a14792d520e23c211f1b4c
https://doi.org/10.1117/12.485388 -
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المؤلفون: Peter Dirksen, R. J. G. Elfrink, Casper A. H. Juffermans, M. Benndorf
المصدر: Microelectronic Engineering. :1089-1092
مصطلحات موضوعية: Materials science, business.industry, Scanning electron microscope, Image quality, Noise (signal processing), Fast Fourier transform, ComputingMethodologies_IMAGEPROCESSINGANDCOMPUTERVISION, Condensed Matter Physics, Porous silicon, Sample (graphics), GeneralLiterature_MISCELLANEOUS, Atomic and Molecular Physics, and Optics, Physics::Geophysics, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, Optics, Metric (mathematics), Electrical and Electronic Engineering, business, Porous medium, Biological system
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المؤلفون: Joseph J. M. Braat, Casper A. H. Juffermans, Alvina M. Williams, Peter Dirksen, Peter De Bisschop, Guido C.A.M. Janssen
المساهمون: Control Systems
المصدر: Proceedings Optical Microlithography XV, 5-8 March 2002, Santa Clara, California, 1392-1399
STARTPAGE=1392;ENDPAGE=1399;TITLE=Proceedings Optical Microlithography XV, 5-8 March 2002, Santa Clara, Californiaمصطلحات موضوعية: Point spread function, Zernike polynomials, business.industry, Extreme ultraviolet lithography, Physics::Optics, Mask inspection, law.invention, Lens (optics), symbols.namesake, Optics, law, Optical transfer function, symbols, Phase retrieval, Projection (set theory), business, Mathematics
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::b04556f67b139eca8737b9d5bb272122
https://doi.org/10.1117/12.474523 -
5
المصدر: Microelectronic Engineering. 35:193-196
مصطلحات موضوعية: business.industry, Chemistry, Condensed Matter Physics, Atomic and Molecular Physics, and Optics, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, law.invention, Standing wave, Laser linewidth, Optics, Resist, law, Active compound, Optoelectronics, Electrical and Electronic Engineering, Diffusion (business), Photolithography, business, Dissolution
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المؤلفون: O. Otto, Kurt G. Ronse, Patrick Jaenen, P. Tzviatkov, Casper A. H. Juffermans, Rik Jonckheere, L. Van den hove, Anthony Yen, J. Garofalo, A. Wong
المصدر: Microelectronic Engineering. 30:141-144
مصطلحات موضوعية: Materials science, business.industry, Condensed Matter Physics, Atomic and Molecular Physics, and Optics, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, Laser linewidth, Optics, Optical proximity correction, Line (geometry), Electrical and Electronic Engineering, business, Lithography, Random logic, Next-generation lithography, Parametric statistics, Electronic circuit
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المؤلفون: Pierre H. Woerlee, H. Lifka, Andrew Jan Walker, Casper A. H. Juffermans, W.H. Manders, G.M. Paulzen, H.G. Pomp, R. Woltjer
المصدر: Microelectronic Engineering. 19:21-24
مصطلحات موضوعية: Fabrication, Materials science, business.industry, Transistor, Condensed Matter Physics, Atomic and Molecular Physics, and Optics, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, law.invention, PMOS logic, CMOS, law, Degradation (geology), Optoelectronics, Electrical and Electronic Engineering, business, NMOS logic, Communication channel, Voltage
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المصدر: IEEE Transactions on Electron Devices. 39:932-938
مصطلحات موضوعية: Electron mobility, Materials science, Silicon, Condensed matter physics, Scattering, Doping, chemistry.chemical_element, Electronic, Optical and Magnetic Materials, Threshold voltage, chemistry, Electric field, Field-effect transistor, Electrical and Electronic Engineering, Scaling
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المصدر: SPIE Proceedings.
مصطلحات موضوعية: Process variation, Engineering, business.industry, Process capability, Monte Carlo method, Process capability index, Process control, Process optimization, Process window, business, Exposure latitude, Algorithm, Simulation
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::a626fb5ad3b3c16325309096d4b4a87f
https://doi.org/10.1117/12.485520 -
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المؤلفون: M.J. van Dort, Jan W. Slotboom, Pierre H. Woerlee, H. Lifka, W.B. de Boer, P. C. Zalm, N. E. B. Cowern, Casper A. H. Juffermans, R.C.M. de Kruif, Andrew Jan Walker
المصدر: Proceedings of IEEE International Electron Devices Meeting.
مصطلحات موضوعية: Materials science, Silicon, business.industry, Resolution (electron density), Doping, chemistry.chemical_element, Polysilicon gate, chemistry, Gate oxide, Electronic engineering, Optoelectronics, Diffusion (business), business, Boron
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::84056c028e2eb39de96a24324831b8b7
https://doi.org/10.1109/iedm.1993.347348