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المؤلفون: Chau Chiung Wang, Mao-Chieh Chen, Chung I. Chang, Zhe Min Zhu, Yu Lin Liu, Peng Sen Chen, Zhen Cheng Wu, Ren Guay Wu, Jiann Fu Chen, L. J. Chen
المصدر: Journal of The Electrochemical Society. 146:4290-4297
مصطلحات موضوعية: Materials science, Dielectric strength, Renewable Energy, Sustainability and the Environment, business.industry, Tantalum, chemistry.chemical_element, Low-k dielectric, Dielectric, Condensed Matter Physics, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, Outgassing, chemistry.chemical_compound, Semiconductor, chemistry, Tantalum nitride, Materials Chemistry, Electrochemistry, Composite material, business, Layer (electronics)