المؤلفون: Sweet, Eric C., Chen, Joshua C.-L., Karakurt, Ilbey, Long, Alison T., Lin, Liwei

المصدر: 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2017 IEEE 30th International Conference on. :205-208 Jan, 2017

Relation: 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS)