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المؤلفون: Sou Gow Wuu, Kou Chin Huang, Chii Wen Cheng, Yean-Kuen Fang, Kan Yuan Lee, Mong-Song Liang
المصدر: Japanese Journal of Applied Physics. 36:1025
مصطلحات موضوعية: Materials science, Hydrogen, Passivation, business.industry, Polysilicon depletion effect, General Engineering, Analytical chemistry, Oxide, General Physics and Astronomy, chemistry.chemical_element, Equivalent oxide thickness, chemistry.chemical_compound, chemistry, Gate oxide, Thin-film transistor, Optoelectronics, business, Plasma processing