المؤلفون: Ko, Woon-San, Song, Myeong Ho, Kim, Ki-Nam, Byun, Jun-Ho, Lee, Do-Yeon, Kim, Eun-gi, Koo, Eun-A, Kwon, So-Yeon, Kim, Geun-Ho, Choi, Dong-Hyeuk, Lee, Ga-Won

المصدر: 2023 7th IEEE Electron Devices Technology & Manufacturing Conference (EDTM) Electron Devices Technology & Manufacturing Conference (EDTM), 2023 7th IEEE. :1-3 Mar, 2023

Relation: 2023 7th IEEE Electron Devices Technology & Manufacturing Conference (EDTM)

المؤلفون: Song, Myeong-Ho, Ko, Woon-San, Kim, Geun-Ho, Choi, Dong-Hyeuk, Lee, Ga-Won

المصدر: Nanomaterials (2079-4991); Dec2022, Vol. 12 Issue 23, p4342, 12p

مصطلحات موضوعية: PLASMA-enhanced chemical vapor deposition, NONVOLATILE random-access memory, THIN films, FOURIER transform infrared spectroscopy, X-ray photoelectron spectroscopy, PENETRATION mechanics, OXYGEN