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المؤلفون: Qais Saadeh, Philipp Naujok, Meiyi Wu, Vicky Philipsen, Devesh Thakare, Frank Scholze, Christian Buchholz, Christian Stadelhoff, Thomas Wiesner, Victor Soltwisch
المصدر: Applied optics. 61(33)
مصطلحات موضوعية: Science & Technology, SURFACE, EFFICIENT, Optics, DIFFRACTION, Atomic and Molecular Physics, and Optics, REFLECTANCE, THIN-FILMS, DESIGN, Physical Sciences, THICKNESS, X-RAY REFLECTIVITY, SCATTERING, Electrical and Electronic Engineering, EXTREME-ULTRAVIOLET, Engineering (miscellaneous)
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::a78f85bcd39f9af528813b3a0cbdb3ea
https://pubmed.ncbi.nlm.nih.gov/36606836 -
2
المؤلفون: André Wählisch, Malte Wansleben, Jan Weser, Christian Stadelhoff, Ina Holfelder, Yves Kayser, Burkhard Beckhoff
المصدر: Metrologia. 60:035001
مصطلحات موضوعية: General Engineering
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3
المؤلفون: Victor Soltwisch, Anja Schönstedt, Qais Saadeh, Christian Buchholz, Christian Stadelhoff, Anna Andrle, Philipp Naujok, Vicky Philipsen, Philipp Hönicke, Heiko Mentzel, Frank Scholze, Christian Laubis
المصدر: Optics Express. 29:40993
مصطلحات موضوعية: Materials science, Extreme ultraviolet lithography, FOS: Physical sciences, Synchrotron radiation, chemistry.chemical_element, 02 engineering and technology, 01 natural sciences, Molecular physics, Electromagnetic radiation, 010309 optics, Condensed Matter::Materials Science, symbols.namesake, Optics, Robustness (computer science), 0103 physical sciences, Thin film, Condensed Matter - Materials Science, business.industry, Materials Science (cond-mat.mtrl-sci), Markov chain Monte Carlo, 021001 nanoscience & nanotechnology, Atomic and Molecular Physics, and Optics, Ruthenium, X-ray reflectivity, chemistry, symbols, 0210 nano-technology, business, Optics (physics.optics), Physics - Optics
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::5e36b4388881437c3b84abee11bb5dd4
https://doi.org/10.1364/oe.426029 -
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المؤلفون: Annett Barboutis, Ayhan Babalik, Jana Puls, Christian Stadelhoff, Anja Schönstedt, Jana Lehnert, Claudia Tagbo, Christian Laubis, Michael Sintschuk, Anja Babuschkin, Heiko Mentzel, Andreas Fischer, Frank Scholze, Christian Buchholz, Sina Jaroslawzew
المصدر: Extreme Ultraviolet (EUV) Lithography X.
مصطلحات موضوعية: Optics, Materials science, Beamline, business.industry, Extreme ultraviolet lithography, Detector, Radiant energy, Radiometry, business, Fluence, Metrology, Diode
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::37df636c64aaf4f39073c293cb67a02f
https://doi.org/10.1117/12.2514933 -
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المؤلفون: Christian Laubis, Annett Barboutis, Martin Biel, Christian Buchholz, Benjamin Dubrau, Andreas Fischer, Anne Hesse, Jana Puls, Christian Stadelhoff, Victor Soltwisch, Frank Scholze
المصدر: Extreme Ultraviolet (EUV) Lithography IV.
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::c5ed422ce607d50c83a71426949dc4ec
https://doi.org/10.1117/12.2011529 -
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المؤلفون: Jana Puls, Christian Laubis, Christian Stadelhoff, Annett Kampe, Frank Scholze, Christian Buchholz, Andreas Fischer
المصدر: SPIE Proceedings.
مصطلحات موضوعية: Materials science, business.industry, Linear polarization, Extreme ultraviolet lithography, Synchrotron radiation, Optical polarization, law.invention, Metrology, Optics, law, Extreme ultraviolet, Optoelectronics, Photolithography, business, Reflectometry
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::86ee86de9dcdd5f141daf0380fd5adb4
https://doi.org/10.1117/12.845098 -
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المؤلفون: Andreas Fischer, Gerhard Ulm, Annett Kampe, Christian Laubis, Christian Buchholz, Frank Scholze, Steven Hesse, Christian Stadelhoff, Jana Puls
المصدر: Alternative Lithographic Technologies.
مصطلحات موضوعية: Physics, business.industry, Extreme ultraviolet lithography, law.invention, Metrology, Wavelength, Optics, law, Extreme ultraviolet, Optoelectronics, Measurement uncertainty, Photolithography, business, Reflectometry, Lithography
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::6dd4b35f45fa9e252190d0328b2f4e73
https://doi.org/10.1117/12.813697 -
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المؤلفون: Dirk Grosenick, Oliver Steinkellner, Christian Stadelhoff, Ronny Ziegler, Axel Hagen, Rainer Macdonald, Tim Nielsen, Herbert Rinneberg
المصدر: Biomedical Optics.
مصطلحات موضوعية: Point spread function, Artifact (error), Fluorescence-lifetime imaging microscopy, Materials science, Laser scanning, business.industry, Physical optics, Laser, law.invention, Optics, law, Reflection (physics), Diffuse reflection, business
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::5885f1bcb1a692dbd40784bc01784fab
https://doi.org/10.1364/biomed.2008.bmd45 -
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المؤلفون: Annett Barboutis, Anton Haase, Christian Stadelhoff, Christian Buchholz, Florian Knorr, Anja Schönstedt, Heiko Mentzel, Frank Scholze, Victor Soltwisch, Andreas Fischer, Christian Laubis, Michael Sintschuk, Jana Puls
المصدر: Extreme Ultraviolet (EUV) Lithography VII
مصطلحات موضوعية: 0301 basic medicine, 030103 biophysics, Materials science, 010304 chemical physics, business.industry, Instrumentation, Extreme ultraviolet lithography, 01 natural sciences, law.invention, Metrology, 03 medical and health sciences, Wavelength, Optics, Beamline, law, 0103 physical sciences, Radiometry, Optoelectronics, Photolithography, Reflectometry, business
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::ba546d194046fd7967e4dc251d56750a
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المؤلفون: Frank Scholze, Andreas Fischer, Christian Laubis, Albrecht Ullrich, Victor Soltwisch, Christian Stadelhoff
المصدر: Extreme Ultraviolet (EUV) Lithography VI
مصطلحات موضوعية: Physics, Brewster's angle, business.industry, Linear polarization, Extreme ultraviolet lithography, Physics::Optics, Synchrotron radiation, 02 engineering and technology, 021001 nanoscience & nanotechnology, Polarization (waves), 01 natural sciences, Collimated light, Numerical aperture, 010309 optics, symbols.namesake, Optics, Beamline, Physics::Space Physics, 0103 physical sciences, symbols, Optoelectronics, 0210 nano-technology, business
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::776d1ce73675c65f2ff0800417b6848c