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1مؤتمر
المؤلفون: Sunoo Kim, Dunn, Shannon, Smith, Steven, Collision, WenLi, Prudhomme, Jamie, Huey-Ming Wang, Maniscalco, Joe, Yathapu, Nithin, Chulgi Song, Wang, Barry, Carr, Christopher, Hsi-Wen Liu, Gall, Bruce, Alaestante, Angelo, Min-Hui Chen, Conti, Richard, ChungJu Yang, Sullivan, Denis, Culafi, Kosta, BumKi Moon, Yii-Cheng Lin, Yu-Lieh Fu, Sieg, Katherine, Larrea, Anne-Sophie, Fish, Norman, Swaine, Regina, Bialy, Alexander, Tallon, Milo, Stapf, Gerard, Hagwood, John, Bryant, Michael, Cottle, Rand, Chang, Stock, Kelling, Mark, Schaefer, Karsten, Franca, Dan, Pinyen Lin, Borst, Christopher, Kwangwook Lee, JongHeun Lim, Skilbred, David, Chien, CC, Robertson, Frank, Fria, Erin
المصدر: 2016 IEEE International Interconnect Technology Conference / Advanced Metallization Conference (IITC/AMC) Interconnect Technology Conference / Advanced Metallization Conference (IITC/AMC), 2016 IEEE International. :8-10 May, 2016
Relation: 2016 IEEE International Interconnect Technology Conference / Advanced Metallization Conference (IITC/AMC)
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2مؤتمر
المؤلفون: Kwan-Yong Lim, Hyunjung Lee, Choongryul Ryu, Kang-Ill Seo, Uihui Kwon, Seokhoon Kim, Jongwan Choi, Kyungseok Oh, Hee-Kyung Jeon, Chulgi Song, Tae-Ouk Kwon, Jinyeong Cho, Seunghun Lee, Yangsoo Sohn, Hong Sik Yoon, Junghyun Park, Kwanheum Lee, Wookje Kim, Eunha Lee, Sang-Pil Sim, Chung Geun Koh, Sang Bom Kang, Siyoung Choi, Chilhee Chung
المصدر: 2010 International Electron Devices Meeting Electron Devices Meeting (IEDM), 2010 IEEE International. :10.1.1-10.1.4 Dec, 2010
Relation: 2010 IEEE International Electron Devices Meeting (IEDM)
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3
المؤلفون: Katherine Sieg, Christopher R. Carr, Karsten Schaefer, M. F. Chen, Christopher L. Borst, David Skilbred, Jong-heun Lim, Kosta Culafi, Milo Tallon, Norman Fish, Frank Robertson, Chulgi Song, John Hagwood, Anne-Sophie Larrea, Angelo Alaestante, Mark Kelling, ChungJu Yang, Denis Sullivan, WenLi Collision, Nithin Yathapu, Hsi-Wen Liu, Yii-Cheng Lin, Cheng-Chung Chien, Erin Fria, Regina Swaine, Gerard Stapf, Dan Franca, BumKi Moon, K. K. W. Lee, Bruce Gall, Jamie Prudhomme, Yu-Lieh Fu, Alexander Bialy, Stock Chang, Shannon Dunn, Michael Bryant, Lin Pinyen, Huey-Ming Wang, Joe Maniscalco, Richard Conti, Rand Cottle, Barry Wang, Steven Smith, Sun-OO Kim
المصدر: 2016 IEEE International Interconnect Technology Conference / Advanced Metallization Conference (IITC/AMC).
مصطلحات موضوعية: Engineering drawing, Materials science, business.industry, Copper interconnect, Process (computing), chemistry.chemical_element, 02 engineering and technology, 021001 nanoscience & nanotechnology, 01 natural sciences, 010309 optics, Lamella (surface anatomy), chemistry, 0103 physical sciences, Optoelectronics, Wafer, 0210 nano-technology, Tin, business, Hard mask
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::16f5a6641fe5a8a4871bd779ed63e8be
https://doi.org/10.1109/iitc-amc.2016.7507638 -
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المؤلفون: Chulgi Song, Sangyuk Lee, Seungjo Lee, Bo Soo Kang, Heejun Jeong, Ilsin An
المصدر: Journal of the Korean Physical Society. 57:1811-1815
مصطلحات موضوعية: Dynamic random-access memory, Fabrication, Materials science, Annealing (metallurgy), business.industry, General Physics and Astronomy, Dielectric, law.invention, law, Ellipsometry, Optoelectronics, Crystallization, business, Dram, High-κ dielectric
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::cac22bcc725ae95b8ba92728f2ccc0a2
https://doi.org/10.3938/jkps.57.1811 -
5
المؤلفون: W. Namkoong, Soo-Bok Chin, Y. Jang, Chulgi Song, Ilsin An, Sung-Muk Lee, Jaisun Kyoung, Jong-Hoi Kim, Tae-Hyuk Ahn
المصدر: Journal of the Korean Physical Society. 53:1650-1654
مصطلحات موضوعية: Materials science, Silicon, business.industry, Oxide, General Physics and Astronomy, chemistry.chemical_element, Dielectric, Substrate (electronics), Atomic layer deposition, chemistry.chemical_compound, chemistry, Ellipsometry, Optoelectronics, business, Layer (electronics), High-κ dielectric
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::331223aecd0dc381c7430edc848e1bb5
https://doi.org/10.3938/jkps.53.1650 -
6
المؤلفون: Dong-Soo Shin, Hye-Keun Oh, Ilsin An, Sangyouk Lee, Heejun Jeong, Chulgi Song, Jaisun Kyoung
المصدر: Japanese Journal of Applied Physics. 47:6536-6539
مصطلحات موضوعية: Novel technique, Haze, Materials science, Physics and Astronomy (miscellaneous), business.industry, General Engineering, General Physics and Astronomy, Early detection, Optics, Ellipsometry, Photomask, business, Layer (electronics), Lithography
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7
المؤلفون: C. J. Park, Hyunsu Ju, Gitae Jeong, Chang-Hyun Park, Jung-hyeon Kim, S.O. Park, Seung-Hwan Song, Dong-Jun Seong, S. Choi, H. K. Kang, Hyoshin Ahn, Chilhee Chung, Min Kyu Yang, E. M. Kim, Chulgi Song, In-Gyu Baek
المصدر: 2011 International Electron Devices Meeting.
مصطلحات موضوعية: Materials science, business.industry, NAND gate, chemistry.chemical_element, Nanotechnology, Chemical vapor deposition, Resistive random-access memory, Barrier layer, Atomic layer deposition, chemistry, Etching (microfabrication), Computer data storage, Optoelectronics, Tin, business
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::56916d9feee1aed1ca6599ded02420bc
https://doi.org/10.1109/iedm.2011.6131654 -
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المؤلفون: Kang-ill Seo, Jongwan Choi, Sang-pil Sim, Yangsoo Sohn, Seung-Hun Lee, Kwan-Heum Lee, Si-Young Choi, Chulgi Song, Kyungseok Oh, Junghyun Park, Choongryul Ryu, Tae-Ouk Kwon, Chilhee Chung, Hyun-Jung Lee, Sang Bom Kang, Hee-Kyung Jeon, Wookje Kim, Seok-Hoon Kim, Kwan-Yong Lim, Uihui Kwon, Hong-Sik Yoon, Chung Geun Koh, Jinyeong Cho, Eunha Lee
المصدر: 2010 International Electron Devices Meeting.
مصطلحات موضوعية: Stress (mechanics), Materials science, business.industry, Logic gate, Electrical engineering, Optoelectronics, D region, Dislocation, business, Metal gate, High electron, High-κ dielectric, Communication channel
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::02e6b4230fa3503bbb1506cff204de55
https://doi.org/10.1109/iedm.2010.5703332 -
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المؤلفون: Minjung Shin, Dongchul Ihm, Chulgi Song, Tianming Bao, Dean Dawson, Vladimir A. Ukraintsev, Moon-Keun Lee
المصدر: Metrology, Inspection, and Process Control for Microlithography XXIII.
مصطلحات موضوعية: Materials science, business.industry, Semiconductor device fabrication, Nanotechnology, Integrated circuit, law.invention, Metrology, law, Dimensional metrology, Computer data storage, Microelectronics, Photomask, business, Critical dimension
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::5feb8bdfa39008ec76449981f89367b1
https://doi.org/10.1117/12.813389 -
10
المؤلفون: Jaisun Kyoung, Jusang Rhim, Soo-Bok Chin, Hyoungjoo Lee, Ilsin An, Chulgi Song, Sangyouk Lee, Tae-Hyuk Ahn
المصدر: SPIE Proceedings.
مصطلحات موضوعية: Materials science, business.industry, Mask inspection, law.invention, Optics, Optical path, Resist, Ellipsometry, law, Reticle, Photolithography, Photomask, business, Lithography
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::34723e54306f26f317748baaae941953
https://doi.org/10.1117/12.772151